Jennifer K. Robinson Consulting

A Bibliography on Capacity Modeling for Semiconductor Manufacturing

Section 30: Real-Time Control: Semiconductor

	C-T Ang, "Viable Acupoint Characterization Enhancement in the Fortification of the In-Line Vulnerable Neural Spots," Proceedings of the 2004 International Symposium on Semiconductor Manufacturing (ISSM 2004), Tokyo, Japan, 2004.
	M. R. Bachicha, "Capacity Assessment Charts: Proactively Identifying and Managing Near-term Factory Constraints," Proceedings of the 2004 International Symposium on Semiconductor Manufacturing (ISSM 2004), Tokyo, Japan, 2004.
	S. X. Bai, N. Srivatsan, and S .B. Gershwin, "Hierarchical Real-Time Scheduling of a Semiconductor Fabrication Facility," Laboratory for Manufacturing and Productivity, Operations Research Center, Massachusetts Institute of Technology. Presented at the Ninth IEEE International Electronics Manufacturing Technology Symposium, 1990.
	G. Baweja and B. Ouyang, "Data Acquisition Approach for Real-Time Equipment Monitoring and Control," IEEE 2002 Advanced Semiconductor Manufacturing Conference (ASMC '02), 223-227, 2002. The authors are from Texas Instrum. Inc., Plano, TX.
	Ying-Jen Chen, Kuo-Sung Huang, Will Chen, and Yu-Ja Hsu, "Using Real Time Dispatcher as a Decision-Making Support System To Resolve Overlapping Dispatching Problem in FAB Manufacturing," 2001 IEEE International Symposium on Semiconductor Manufacturing (ISSM '01), 63-66, 2001. The authors are from MACRONIX Int. Co. Ltd., Hsinchu.
	T. Croft and B. Hand, "Using Real-Time Data in Reducing Idle Time due to Avoidable Interruptions," 2003 IEEE International Symposium on Semiconductor Manufacturing (ISSM '03), 63-66, 2003. The authors are from FASL, LLC, Austin, TX, USA.
	Hsuan-Wei Chang, Zanne Su, Miles Chuang, An-Tai Wang, Y.L. Whang, Olay Yu, Ying-Jen Chen, "Two-Echelon, Multiple-Objectives Integrated Dispatching System," 2003 IEEE International Symposium on Semiconductor Manufacturing (ISSM '03), 297-300, 2003. The authors are from Macronix Int. Co. Ltd., Hsin-Chu, Taiwan.
	M. D. Hsieh, Amos Lin, Kenley Kuo, H. L. Wang, "A Decision Support System of Real Time Dispatching in Semiconductor Wafer Fabrication with Shortest Process Time in Wet Bench," 2003 IEEE International Symposium on Semiconductor Manufacturing (ISSM '03), 301-303, 2003. The authors are from Macronix Int. Co. Ltd., Hsin-Chu, Taiwan.
	Kuang-Huan Hsu and Chieh-Chin Lan, "Photolithography Area Dispatching Scheme for Advanced Technology in Foundry Fabs," Proceedings of the 2000 Semiconductor Manufacturing Technology Conference, 211-216, 2000. The authors are from Taiwan Semicond. Manuf. Co.
	Y. D. Kim, S. O. Shim, B. Choi, H. Hwang, "Simplification Methods for Accelerating Simulation-Based Real-Time Scheduling in a Semiconductor Wafer Fabrication Facility," IEEE Transactions on Semiconductor Manufacturing, Vol. 16, No. 2, 290-298, 2003.
	S. A. Leslie, "Real Time Dispatcher on Demand," IEEE 2004 Advanced Semiconductor Manufacturing Conference (ASMC '04), 267-273, 2004. Authors are from Microelectron. Div., IBM Corp., Essex Junction, VT, USA.
	Tuung Luoh, Ling-Wuu Yang, Hsueh-Hao Shih, Chi-Tung Huang, Kuang-Chao Chen, Yaw-Lin Hwang, C. Hsueh, C., and H. Chung, "Process Optimization and Productivity Improvement by Real-Time Data Collection System," Proceedings of the 2002 Semiconductor Manufacturing Technology Conference, 140-143, 2002. The authors are from Macronix Int. Co. Ltd., Hsinchu, Taiwan.
	R. G. Petrakian, "Shop Floor Control in Wafer Fabs Using Predictions and Pricing," Ph.D. Dissertation, Department of Industrial Engineering and Operations Research, University of California at Berkeley, 1992.
	J. Park, S. A. Reveliotis, D. A. Bodner, and L. F. McGinnis, “A Distributed, Event-Driven Control Architecture for Flexibly Automated Manufacturing Systems,” International Journal of Computer Integrated Manufacturing, Vol. 15, No. 2, 109-126, 2002.
	N. Srivatsan, S. X. Bai, and S. B. Gershwin, "Hierarchical Real-Time Integrated Scheduling of a Semiconductor Fabrication Facility," Laboratory for Manufacturing and Productivity, Massachusetts Institute of Technology, 1992. To appear in the Academic Press Control and Dynamic Systems series, Vol. 61, 1994. edited by C. T. Leondes.
	S. Stevens, R. Harper, P. Knutrud, and A. Carlson, "Tighter Process Control and Reduced Cycle Times Using Off-Line Recipe Setup," IEEE 2000 Advanced Semiconductor Manufacturing Conference (ASMC '00), 199-202, 2000. The authors are from Analog Devices Inc., Wilmington, MA.
	G. Sullivan and K. Fordyce, "IBM Burlington's Logistics Management System," Interfaces, Vol. 20, No. 1, 43-64, 1990. Updated article available in Production and Operations Management, Vol. 1, No. 1, 70-86, 1992.
	Shou-Chi Tseng, Shu-Li Chen, Jen-Kuan Chang, Chien-Chang Chen, and Mei-Ling Chen, "An Effective Recipe Control and Management System (RCMS) Deployed in Semiconductor Manufacturing," Proceedings of the 2004 Semiconductor Manufacturing Technology Conference, 135-138, 2004. The authors are from United Microelectron. Corp., Hsinchu, Taiwan.

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