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A Bibliography on Capacity Modeling for Semiconductor Manufacturing

Section 28: Real-Time Control: Batch

bulletJ. W. Fowler, G. L. Hogg, and D. T. Phillips, "Control Of Multiproduct Bulk Server Diffusion/Oxidation Processes. Part 2: Multiple Servers," IIE Transactions, Vol. 32, No. 2, 167-176, 2000.
bulletJ. W. Fowler, D. T. Phillips, and G. L. Hogg, "Real-Time Control of Multiproduct Bulk-Service Semiconductor Manufacturing Processes," IEEE Transactions on Semiconductor Manufacturing, Vol. 5, No. 2, 158-163, 1992.
bulletC. R. Glassey, F. Markgraf, and H. Fromm, "Real Time Scheduling of Batch Operations," IBM Technical Report No. TR 28.164, November 1990.
bulletC. R. Glassey and W. W. Weng, "Dynamic Batching Heuristic for Simultaneous Processing," IEEE Transactions on Semiconductor Manufacturing, Vol. 4, No. 2, 77-82, 1991.
bulletJ. K. Robinson, J. W. Fowler, and J. F. Bard, "The Use of Upstream and Downstream Information in Scheduling Semiconductor Batch Operations," International Journal of Production Research, Vol. 33, No. 7, 1849-1870, 1995.
bulletH. Taneja and S. Johal, "Scheduling Policies for Long Cycle-Time and Large Load Size Operation in a Semiconductor Wafer Fab," Working Paper, Analog Devices, Wilmington Fab, 1997.
bulletW.W. Weng and R. C. Leachman, "An Improved Methodology for Real-Time Production Decisions at Batch-Process Work Stations," IEEE Transactions on Semiconductor Manufacturing, Vol. 6, No. 3, 219-225, 1993.
bulletD. J. van der Zee, A. van Harten, and P. Schuur, "On-Line Scheduling Of Multi-Server Batch Operations," IIE Transactions, Vol. 33, No. 7, 569-586, 2001.

 
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