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A Bibliography on Capacity Modeling for Semiconductor Manufacturing
Section 28: Real-Time Control: Batch
 | J. W. Fowler, G. L. Hogg, and D. T. Phillips, "Control Of
Multiproduct Bulk Server Diffusion/Oxidation Processes. Part 2: Multiple
Servers," IIE Transactions, Vol. 32, No. 2, 167-176, 2000. |
 | J. W. Fowler, D. T. Phillips, and G. L. Hogg, "Real-Time Control of
Multiproduct Bulk-Service Semiconductor Manufacturing Processes," IEEE
Transactions on Semiconductor Manufacturing, Vol. 5, No. 2, 158-163, 1992. |
 | C. R. Glassey, F. Markgraf, and H. Fromm, "Real Time Scheduling of
Batch Operations," IBM Technical Report No. TR 28.164, November 1990. |
 | C. R. Glassey and W. W. Weng, "Dynamic Batching Heuristic for
Simultaneous Processing," IEEE Transactions on Semiconductor
Manufacturing, Vol. 4, No. 2, 77-82, 1991. |
 | J. K. Robinson, J. W. Fowler, and J. F. Bard, "The Use of Upstream
and Downstream Information in Scheduling Semiconductor Batch
Operations," International Journal of Production Research, Vol. 33, No.
7, 1849-1870, 1995. |
 | H. Taneja and S. Johal, "Scheduling Policies for Long Cycle-Time and
Large Load Size Operation in a Semiconductor Wafer Fab," Working Paper,
Analog Devices, Wilmington Fab, 1997. |
 | W.W. Weng and R. C. Leachman, "An Improved Methodology for Real-Time
Production Decisions at Batch-Process Work Stations," IEEE Transactions
on Semiconductor Manufacturing, Vol. 6, No. 3, 219-225, 1993. |
 | D. J. van der Zee, A. van Harten, and P. Schuur, "On-Line Scheduling
Of Multi-Server Batch Operations," IIE Transactions, Vol. 33, No. 7,
569-586, 2001. |

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