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A Bibliography on Capacity Modeling for Semiconductor Manufacturing
Section 26: Production Planning and Control: Semiconductor
 | B. D. Asher, "MES: Improving Cycle Time And Quality [PCB
Manufacture]," Circuits Assembly, Vol. 10, No. 3, 50-55, 1999. |
| D. H. Baek, W. C. Yoon, and S. C. Park, "A Spatial Rule Adaptation
Procedure for Reliable Production Control in a Wafer Fabrication
System," International Journal of Production Research, Vol. 36, No. 6,
1475-1491, 1998. |
| J. Baliga, "Advances in MES: Complying with the CIM Framework,"
Semiconductor International, Vol. 20, No. 1, 69-76, 1997. |
| J. Baliga, "MES and CIM: at the Center of Productivity,"
Semiconductor International, Vol. 21, No. 8, 104-112, 1998. |
| G. Baweja, M. Chandrasekaran, and Bing Ouyang, "An Approach to Recipe Control in Wafer Fab," IEEE 2002 Advanced Semiconductor Manufacturing Conference (ASMC '02), 295-298, 2002. The authors are from Texas Instrum. Inc., Plano, TX. |
| A. M. Bonvik, S. B. Gershwin, and D. E. Troxel, "Operating High
Variability Manufacturing Systems," Working Paper, Operations Research
Center, MIT, 1995. |
| R. Burda, B. Colwill, and F. Liang, "Touchless 300 mm Fab Production in the Modern Business Environment," IEEE 2004 Advanced Semiconductor Manufacturing Conference (ASMC '04), 262-266, 2004. Authors are from IBM Microelectron., East Fishkill, NY, USA. |
| P. Burggraaf, "MES Software: Preparing Your Questions,"
Semiconductor International, Vol. 18, No. 1, 1995. |
| S. Chadwick, "An Automated Approach to Consistent Constraint Tool
Output Management," Proceedings of the 2004 International Symposium on
Semiconductor Manufacturing (ISSM 2004), Tokyo, Japan, 2004. |
| H-N Chen, J. Cochran, and R. Dabbas, "Using Manufacturing Rules to
Implement Daily Production Plans," Proceedings of the International
Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM
2002), Editors G. T. Mackulak, J. W. Fowler, and A. Schoemig, Tempe, AZ,
April 10-12, 2002. 175-181. |
| H. C. Chen and C. E. C. Lee, "Pull System for Control and Dummy
Wafers," International Journal of Advanced Manufacturing Technology,
Vol. 22, No. 11-12, 805-818, 2003. |
| T. Chen, "A Fuzzy Mid-Term Single-Fab Production Planning
Model," Journal of Intelligent Manufacturing, Vol. 14, No. 3-4,
273-285, 2003. |
| Fan-Tien Cheng, Chih-Feng Chang and Shang-Lun Wu, "Development of Holonic Manufacturing Execution Systems," Journal of Intelligent Manufacturing, Vol. 15, No. 2, 253-267, 2004. |
| Sheng-Luen Chung and MuDer Jeng, "Fabulous MESs and C/Cs: an Overview of Semiconductor Fab Automation Systems," IEEE Robotics & Automation Magazine, Vol. 11, No. 1, 8-18, 2004. |
| S. H. Chung, W. L. Pearn, A. H. I. Lee, and W. T. Ke, "Job Order
Releasing And Throughput Planning For Multi-Priority Orders In Wafer
Fabs," International Journal of Production Research, Vol. 41, No. 8,
1765-1784, 2003. |
| R. Cigolini, A. Comi, A. Micheletti, M. Perona, and A. Portioli,
"Implementing New Dispatching Rules at SGS-Thomson
Microelectronics," Production Planning & Control, Vol. 10, No. 1,
97-106, 1999. |
| D. W. Collins, V. Lakshman, L. D. Collins, "Dynamic Simulator for WIP Analysis in Semiconductor Manufacturing," 2001 IEEE International Symposium on Semiconductor Manufacturing (ISSM '01), 71-74, 2001. The authors are from Arizona State Univ. East, Mesa, AZ. |
| J. E. Dayhoff and R. W. Atherton, "A Model for Wafer Fabrication
Dynamics in Integrated Circuit Manufacturing," IEEE Transactions on
Systems, Man and Cybernetics, Vol. 17, No. 1, 91-100, 1987. |
| E. V. Denardo and C. S. Tang, "Linear Control of a Markov Production
System," Operations Research, Vol. 40, No. 2, 259-278, 1992. |
| M. M. Dessouky and R. C. Leachman, "Dynamic Models of Production With
Multiple Operations And General Processing Times," Journal of the
Operational Research Society, Vol. 48, No. 6, 647-654, 1997. |
| J. S. Fenner, M. K. Jeong, and Jye-Chyi Lu, "Optimal Automatic Control of Multistage Production Processes," IEEE Transactions on Semiconductor Manufacturing, Vol. 18, No. 1, 94-103, 2005. Authors are from Intel Corp., Hillsboro, OR, USA. |
| F. Frederix, "Planning and Scheduling Multi-Site Semiconductor
Production Chains: A Survey Of Needs, Current Practices And Integration
Issues," Conference on IT and Manufacturing Partnerships: Delivering
the Promise, Galway, Ireland, 107-116, 1996. |
| H. Fromm, C. Dillenberger, and A. Wollensak, "Optimization in
Micro-electronics Manufacturing," Optimization in Industrial
Environments, eds. T.A. Ciriani and R.C. Leachman, John Wiley and Sons,
Chichester 1993, 65-80. |
| U. Gramann, F. Frauenhoffer, R. Sturm, P. Matuscheck, M. Suntrup, T.
Kaufmann, W. Schafer, "New Concepts For Electronic Manufacturing
Facilities By Using Semiconductor Equipment Standards And Models,"
Proceedings of EuPac'98. 3rd European Conference on Electronic Packaging
Technology. Nuremberg, Germany, 15-17 June 1998. |
| S. Hayashi, Y. Tanaka, and E. Kodama, "A New Manufacturing Control
System Using Mahalanobis Distance for Maximizing Productivity," IEEE
Transactions on Semiconductor Manufacturing, Volume 15, Number 4, 442-446,
2002. |
| D. M. Hildebrandt, "SECS in the '90s," Industrial Computing,
Vol. 14, No. 6, 47-48, 1995. |
| K. Horiguchi, N. Raghavan, R. Uzsoy, and S. Venkateswaran,
"Finite-Capacity Production Planning Algorithms for a Semiconductor
Wafer Fabrication Facility," International Journal of Production
Research, Vol. 39, No. 5, 825-842, 2001. |
| M. D. Hu and S. C. Chang, "Translating Fab Cycle Time and Output Targets
into Production Control Requirements for Tool Groups," 2000
Semiconductor Manufacturing Technology Workshop, 2000. |
| M. D. Hu and S. C. Chang, "Translating Overall Production Goals into
Distributed Flow Control Parameters for Semiconductor Manufacturing,"
Journal of Manufacturing Systems, Vol. 22, No. 1, 46-63, 2003. |
| Y-F Hung and R. C. Leachman, "A Production Planning Methodology for
Semiconductor Manufacturing Based on Iterative Simulation and Linear
Programming Calculations," SRC Publication No. C92846, 1993. Later
published in IEEE Transactions on Semiconductor Manufacturing, Vol. 9, No.
2, 257-269, 1996. |
| Y. Ishii and N. Ito, "Simulation and Dispatching Systems for Production Fab Management," 2001 IEEE International Symposium on Semiconductor Manufacturing (ISSM '01), 223-227, 2001. The authors are from Fujitsu AMD Semicond. Ltd., Aizuwakamatsu City. |
| Y. J. Jang, "Buffer Size Optimization in Photolithography Cluster in
LCD Line," Proceedings of the 2004 International Symposium on
Semiconductor Manufacturing (ISSM 2004), Tokyo, Japan, 2004. |
| P. K. Johri, "Optimal Partitions for Shop Floor Control in
Semiconductor Wafer Fabrication," European Journal of Production
Research, Vol. 59, No. 2, 294-297, 1992. |
| H. Katayama, J. Nakazato, S. Ishikawa, and M. Ishii, "Some Advanced
Semiconductor Production-Inventory Management Systems And Their
Performances," Computers & Industrial Engineering, Vol. 33, No.
3-4, 705-708, 1997. |
| R. Kerrigan (Filtronic Compound Semiconductors Ltd), "From 6
inch Silicon to 6 inch GaAs with a High Productivity, High Yield
Approach," Compound Semiconductor Manufacturing Expo, July 9-11, 2001. |
| J. S. Kim and R. C. Leachman, "Decomposition Method Application to a
Large Scale Linear Programming WIP Projection Model," European Journal
of Production Research, Vol. 74, No. 1, 152-160, 1994. |
| S. Kim, K. R. Davis, J. F. Cox, "Investigation of Flow Mechanisms in
Semiconductor Wafer Fabrication III," International Journal of
Production Research, Vol. 41, No. 4, 681-698, 2003. |
| R. C. Leachman, "Modeling Techniques for Automated Production Planning
in the Semiconductor Industry," SRC Publication No. C92847, 1993. |
| R. C. Leachman, R. F. Benson, C. Liu, and D. J. Raar, "IMPRESS: An
Automated Production-Planning and Delivery-Quotation System at Harris
Corporation - Semiconductor Sector," Interfaces, Vol. 26, No. 1, 6-37,
1996. |
| Y. Lee, S. Kim, S. Yea, and B. Kim, "Production Planning In
Semiconductor Wafer Fab Considering Variable Cycle Times," Computers
& Industrial Engineering, Vol. 33, No. 3-4, 713-716, 1997. |
| Bo Li and J. Wu, "Factory Throughput Improvement Through Intelligent Integrated Delivery In 300 mm Wafer Manufacturing," 2003 IEEE International Symposium on Semiconductor Manufacturing (ISSM '03), 59-62, 2003. The authors are from Intel Corp., Hillsboro, OR, USA. |
| S. X. C. Lou and P. W. Kager, "A Robust Production Control Policy for
VLSI Wafer Fabrication," IEEE Transactions on Semiconductor
Manufacturing, Vol. 2, No. 4, 159-164, 1989. |
| S. Lou, H. Yan, S. Sethi, A. Gardel, and P. Deosthali, "Hub-Centered
Production Control of Wafer Fabrication," Proceedings of the Advanced
Semiconductor Manufacturing Conference, September, 1990, Danvers, MA. |
| S. Lou, H. Yan, S. Sethi, A. Gardel, and P. Deosthali, "Using
Simulation to Test the Robustness of Various Existing Production Control
Policies," Proceedings of the 1991 Winter Simulation Conference,
261-269, 1991. Note: this work was also submitted to IEEE Transactions on
Semiconductor Manufacturing in 1992. |
| A. Matsuyama and J. Niou, "State-Of-The-Art Automation System Of An
ASIC Wafer Fab In Japan," Proceedings of the IEEE/SEMI International
Semiconductor Manufacturing Science Symposium, San Francisco, CA, 42-47,
1993. |
| J. McGehee, J. Hebley and J. Mahaffey, "MMST Computer-Integrated
Manufacturing System Framework," IEEE Transactions on Semiconductor
Manufacturing, Vol. 7, No. 2, 107-116, 1994. |
| H. S. Min, and Y. Yih, "Selection of Dispatching Rules on Multiple
Dispatching Decision Points in Real-Time Scheduling of a Semiconductor Wafer
Fabrication System," International Journal of Production Research, Vol.
41, No. 16, 3921-3941, 2003. |
| K. Miyashita, T. Okazaki, and H. Matsuo, "Simulation-based Advanced
WIP Management and Control in Semiconductor Manufacturing," Proceedings
of the 2004 Winter Simulation Conference, Washington, DC, Dec. 5-8, 2004. |
| K. Miyashita (Natl. Inst. of Advanced Industrial Science & Technology)
and K. Senoh, H. Ozaki, and H. Matsuo (Institute of Policy & Planning
Sciences), "Constant Time Interval Production Planning with Application
to WIP Control in Semiconductor Fabrication," Proceedings of the 2003
Winter Simulation Conference, S. Chick, P. J. Sánchez, D. Ferrin, and D. J.
Morrice, eds., 2003. |
| M. Mollaghasemi, K. LeCroy, and M. Georgiopoulos, "Application of
Neural Networks and Simulation Modeling in Manufacturing System
Design," Interfaces, Vol. 28, No. 5, 100-114, 1998. |
| A. Najmi and C. Lozinski, "Managing Factory Productivity Using
Object-Oriented Simulation for Setting Shift Production Targets in VLSI
Manufacturing," Society of Manufacturing Engineers Technical Paper,
AUTOFACT Conference, Detroit, MI, 1989. |
| J. M. Padillo and D. Meyersdorf, "A Strategic Domain: IE in the
Semiconductor Industry," IIE Solutions, March 1998, 36-42. |
| P. F. Pai, C. E. Lee and T. H. Su, "A Daily Production Model for
Wafer Fabrication," International Journal of Advanced Manufacturing
Technology, 58-63, 2004. |
| J. Pickerill, "Better Cycle Time and On-Time Delivery Via Real-Time
Dispatching," Solid State Technology, Vol. 43, No. 6, 151-153, 2000. |
| R. Qiu, R. Burda, and R. Chylak, "Distributed WIP Control in Advanced Semiconductor Manufacturing," IEEE 2002 Advanced Semiconductor Manufacturing Conference (ASMC '02), 49-54, 2002. The authors are from Div. of Eng., Penn State Great Valley, Malvern, PA. |
| R. G. Qiu and Mengchu Zhou, "Mighty MESs; State-of-the-Art and Future Manufacturing Execution Systems," IEEE Robotics & Automation Magazine, Vol. 11, No. 1, 19-25, 2004. |
| A. A. Ravitch and K. Ebbs, "Extracting the Most Out of your
Simulation Model: A New System for Planning, Executing, and
Problem-Solving," Proceedings of the International Conference on
Modeling and Analysis of Semiconductor Manufacturing (MASM 2002), Editors G.
T. Mackulak, J. W. Fowler, and A. Schoemig, Tempe, AZ, April 10-12, 2002.
131-136. |
| U. Rohrer, "Automated Lot Tracking and Identification System,"
Proceedings of the 1998 Advanced Semiconductor Manufacturing Conference and
Workshop (ASMC 98), Boston, MA, 142-144, 1998. |
| D. V. Savell, R. A. Perez, and S. W. Koh, "Scheduling Semiconductor
Wafer Production: An Expert System Approach," IEEE Expert, Vol. 4, No.
3, 9-15, 1989. |
| T. Segal and A. Kalir, "A Breakthrough In Utilization Maximization Via Real-Time Tool Performance Feedback," 2003 IEEE International Symposium on Semiconductor Manufacturing (ISSM '03), 39-42, 2003. The authors are from Intel Corp., Kiryat Gat, Israel. |
| D. Y. Sha and C. Y. Liu, "A Simulated Annealing Algorithm for
Integration of Shop Floor Control Strategies in Semiconductor Wafer
Fabrication," International Journal of Advanced Manufacturing
Technology, Vol. 22, No. 1-2, 75-88, 2003. |
| J. Sieberg and R. Walter, "A Scheduling and Resource Optimizing MES
for the Semicondutor and MEMS Industry," Proceedings of the 14th Annual
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop,
ASMC03, Munich, Germany, 2003. |
| H. Toba, H. Izumi, H. Hatada, and T. Chikushima, "Dynamic Load Balancing Among Multiple Fabrication Lines through Estimation of Minimum Inter-Operation Time," IEEE Transactions on Semiconductor Manufacturing, Vol. 18, No. 1, 202-213, 2005. Authors are from NEC Electron Devices, NEC Corp., Kanagawa, Japan.
|
| J. C. Tyan, J. C. Chen, and F. K. Wang, "Development of a
State-Dependent Dispatch Rule using Theory of Constraints in Near-Real-World
Wafer Fabrication," Production Planning & Control, Vol. 13, No. 3,
253-261, 2002. |
| H. Yan, S. Lou, and S. P. Sethi, "Robustness of Various Production
Control Policies in Semiconductor Manufacturing," Production and
Operations Management, Vol. 9, No. 2, 171-183, 2000. |
| H. Yan, S. Lou, S. Sethi, A. Gardel, and P. Deosthali, "Testing the
Robustness of Two-Boundary Control Policies in Semiconductor
Manufacturing," IEEE Transactions on Semiconductor Manufacturing, Vol.
9, No. 2, 285-288, 1996. |
| X. Yao, M. Fu, S. I. Marcus, and E. Fernandez, "Incorporating
Production Planning into Preventive Maintenance Scheduling in Semiconductor
Fabs," Proceedings of the International Conference on Modeling and
Analysis of Semiconductor Manufacturing (MASM 2002), Editors G. T. Mackulak,
J. W. Fowler, and A. Schoemig, Tempe, AZ, April 10-12, 2002. 84-89. |
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