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A Bibliography on Capacity Modeling for Semiconductor Manufacturing
Section 24: Performance Evaluation
 | P. J. Agrell and B. M. West, "A Caveat On The Measurement Of
Productive Efficiency," International Journal of Production Economics,
Vol. 69, No. 1, 1-14, 2001. |
| H. Akkermans and W. Bertrand, "On The Usability Of Quantitative
Modelling In Operations Strategy Decision Making," International
Journal of Operations & Production Management, Vol. 17, No. 9-10,
953-966, 1997. |
| M. Allam and H. Alla, "Modeling and Simulation Of An Electronic
Component Manufacturing System Using Hybrid Petri Nets," IEEE
Transactions on Semiconductor Manufacturing, Vol. 11, No. 3, 374-383,
1998. |
| C. Arbib, G. Iuliano, and A. Da Soghe, "Optimizing Multichamber Work
Cell Management: An Application to a DRAM Wafer Fab," IEEE Transactions
on Semiconductor Manufacturing, Vol. 14, No. 3, 265-272, 2001. |
| T. Arzt, "Using AutoSched to Optimize the Production Performance of a
New Semiconductor Wafer Fab." To be published in Semiconductor Fabtech,
Eighth Edition, ICG Publishing, 1998. Preprint available from www.crc.de. |
| T. Arzt and F. Bulcke, "A New Low Cost Approach in 200 mm and 300 mm
AMHS." Submitted for publication in Semiconductor Fabtech, Tenth
Edition, ICG Publishing, 1999. Preprint available from www.crc.de. Abstract
will be available from www.fabtech.org in 1999. |
| L. F. Atherton and R. W. Atherton, Wafer Fabrication: Factory Performance
and Analysis, Kluwer Academic Publishers, 1995. |
| L. M. Aucoin (Raytheon RF Components), "The Challenges and Benefits
of Running a Dual Use GaAs Foundry," Compound Semiconductor
Manufacturing Expo, July 9-11, 2001. |
| M. Aybar and K. Potti, "Case Studies in Improving Equipment
Productivity in TI's DMOS5 Fab Using ToolSim," Proceedings of the
International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A.
Schoemig, Tempe, AZ, April 10-12, 2002. 42-45. |
| M. Baudin, V. Mehrotra, B. Tullis, D. Yeaman, and R. A. Hughes, "From
Spreadsheets to Simulations: A Comparison of Analysis Methods for IC
Manufacturing Performance," Proceedings of the 4th Annual International
Semiconductor Manufacturing Science Symposium, 1992. |
| E. L. Bass, D. D. Pillai, and J. C. Dempsey, "300 mm Full-Factory Simulations for 90 nm and 65 nm IC Manufacturing," 2003 IEEE International Symposium on Semiconductor Manufacturing (ISSM '03), 35-38, 2003. The authors are from Intel Corp., Chandler, AZ, USA. |
| S. M. Berlow, S. J. Hood, and C. Y. Wong, "On Improving Semiconductor
Line Cycle Time without Losing Throughput," Proceedings of the IBM
International Manufacturing Productivity Symposium, IBM East Fishkill, New
York, October 12-15, 1993. |
| R. Billings, "A Proposed Semiconductor Industry Standard for
Definition and Measurement of Factory-Level Productivity," Proceedings
of the International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A.
Schoemig, Tempe, AZ, April 10-12, 2002. 163-168. |
| U. S. Bititci, P. Suwignjo, and A. S. Carrie, "Strategy Management
Through Quantitative Modelling Of Performance Measurement Systems,"
International Journal of Production Economics, Vol. 69, No. 1, 15-22, 2001. |
| J. Bonal, C. Ortega, L. Rios, S. Aparicio, M. Fernandez, M. Rosendo, A.
Sanchez, and S. Malvar, "Overall Fab Efficiency," Proceedings of
the 1996 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 49-52,
1996. |
| S. Brown, F. Chance, J. W. Fowler, and J. K. Robinson, "A Centralized
Approach to Factory Simulation", Future Fab International, Vol. 3,
83-86, 1997. |
| P. Burggraff, "Using Factory Simulation: 'Virtual' Wafer
Fabrication," Semiconductor International, 120-124, July 1994. |
| D. Y. Burman, F. J. Gurrola-Gal, A. Nozari, S. Sathaye, and J. P. Sitarik,
"Performance Analysis Techniques for IC Manufacturing Lines,"
AT&T Technical Journal, Vol. 65, No. 4, 46-57, 1986. |
| M. Burman, S. B. Gershwin, C. Suyematsu, "Hewlett-Packard Uses
Operations Research To Improve The Design Of A Printer Production
Line," Interfaces, Vol. 28, No. 1, 24-26, 1998. |
| E. Campbell, R. Wright, J. Cheatham, M. Schulz; J. L. Berry,
"Simulation, Modeling for 300mm Semiconductor Factories," Solid
State Technology, Vol. 43, No. 10, 95-100, 2000. |
| T. A. Carbone, "Measuring Efficiency of Semiconductor Manufacturing Operations Using Data Envelopment Analysis (DEA)," IEEE 2000 Advanced Semiconductor Manufacturing Conference (ASMC '00), 56-62, 2000. The author is from Fairchild Semicond., USA. A copy of the paper can be downloaded from the author's website. |
| M. Caron, D. Fronckowiak, P. Hayes and P. Miller, "Mask Cycle Time
and Serviceability Improvement through Capacity Planning and Scheduling
Software," Proceedings of the 1997 Advanced Semiconductor Manufacturing
Conference (ASMC 97), Boston, MA, 58-61, 1997. |
| F. Chance, J. K. Robinson, and N. Winter, "Getting To Good Answers:
Effective Methods For Validating Complex Models," SMOMS Conference. San
Francisco, CA, January, 1999. |
| Y. S. Chang, V. Krishnamurthy, J. W. Fowler, J. Mou and R. Kim,
"Laser Marking Study Proves Benefits of Simulation for Backend
Tools," Solid State Technology, Vol. 44, No. 8, 85, 2001. |
| D. W. Collins, J.-J. Flores-Godoy, K. S. Tsakalis, and F. C. Hoppensteadt, "Diffusion Bay Simulation and its Impact on the Overall FAB Performance: a Simplified Example," 2003 IEEE International Symposium on Semiconductor Manufacturing (ISSM '03), 315-318, 2003. The authors are from Arizona State Univ., Mesa, AZ, USA. |
| The Competitive Semiconductor Manufacturing Program, "The Competitive
Semiconductor Manufacturing Survey: First Report on Results of the Main
Phase," Report CSM-02, Engineering Systems Research Center, University
of California, Berkeley, April 2, 1993. (Leachman and Hodges). |
| W. W. Cooper, K. K. Sinha, and R. S. Sullivan, "Evaluating the
Information Content of A Measure of Plant Output: an Application to
High-Technology Manufacturing," Annals of OR, Vol. 68, No. 1, 329-360,
1996. |
| W. W. Cooper, K. K. Sinha, and R. S. Sullivan, "Measuring Complexity
on High-Technology Manufacturing: Indexes for Evaluation," Interfaces,
Vol. 22, No. 4, 38-48, 1992. |
| V. L. Crittenden, "Closing the Marketing / Manufacturing Gap,"
Sloan Management Review, Vol. 33, 41-52, 1992. |
| B. Dal, P. Tugwell, and R. Greatbanks, "Overall Equipment
Effectiveness As A Measure Of Operational Improvement - A Practical
Analysis," International Journal of Operations and Production
Management, Vol. 20, No. 11-12, 1488-1502, 2001. |
| D. R. Delp, "A New X-Factor Contribution Measure for Identifying Machine Level Capacity Constraints and Variability," IEEE 2004 Advanced Semiconductor Manufacturing Conference (ASMC '04), 334-338, 2004. Author is from Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA. |
| A. J. de Ron and J. E. Rooda, "Fab Performance," IEEE Transactions on Semiconductor Manufacturing, Vol. 18, No. 3, 399-405, 2005. |
| B. L. Deuermeyer, G. L. Curry, and R. M. Feldman, "An Automatic
Modeling Approach to the Strategic Analysis of Semiconductor Fabrication
Facilities," Production and Operations Management, Vol. 2, No. 3, 1993. |
| P. Devlin, C. Thielemier, and D. E. Wehrlin, "Lost Utilization-Constraint Performance Management," 2003 IEEE International Symposium on Semiconductor Manufacturing (ISSM '03), 51-54, 2003. The authors are from Intel Corp., Colorado Springs, CO, USA. |
| J. Fisher, "Use of Nonfinancial Performance Measures," Journal
of Cost Management, Spring 1992, 31-38, 1992. |
| J. W. Fowler, S. Brown, H. Gold, and A. Schoemig, "Measurable
Improvements in Cycle-Time-Constrained Capacity," Proceedings of the
6th IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing
(ISSM), October 6-8, 1997, San Francisco, A21-A24. |
| A. C. Garavelli, "Performance Analysis Of A Batch Production System
With Limited Flexibility," International Journal of Production
Economics, Vol. 69, No. 1, 39-48, 2001. |
| N. Govind (The Pennsylvania State University) and D. Fronckowiak (IBM
Microelectronics), "Resident-Entity based Simulation of Batch Chamber
Tools in 300mm Semiconductor Manufacturing," Proceedings of the 2003
Winter Simulation Conference, S. Chick, P. J. Sánchez, D. Ferrin, and D. J.
Morrice, eds., 2003. |
| N. Govind and D. Fronckowiak, "Setting Performance Targets in a 300mm
Wafer Fabrication Facility," Proceedings of the 2003 Advanced
Semiconductor Manufacturing Conference, Munich, Germany, 2003.
(papers/capbib/performance) |
| N. S. Grewal, A. C. Bruska, T. M. Wulf, and J. K. Robinson,
"Validating Simulation Model Cycle Times at Seagate Technology."
Submitted to the 1999 Winter Simulation Conference, Phoenix, AZ. |
| T. Guimaraes, "Field Testing of the Proposed Predictors of BPR
Success in Manufacturing Firms," Journal of Manufacturing Systems, Vol.
18, No. 1, 53-65, 1999. |
| M. Gupta, H. J. Ko, and H. Min, "TOC-Based Performance Measures and
Five Focusing Steps in a Job-Shop Manufacturing Environment,"
International Journal of Production Research, Vol. 40, No. 4, 907-930, 2002. |
| A. Hakim (Intel), "Reduce Manufacturing Non Value Added (NVA)
Activities," Proceedings of the 2004 International Symposium on
Semiconductor Manufacturing (ISSM 2004), Tokyo, Japan, 2004. |
| J. F. Hallas, J. D. Kim, C. Internicola, and C. T. Mosier, "An
Investigation of Operating Methods for 0.25 Micron Semiconductor
Manufacturing," Proceedings of the Winter Simulation Conference, 1996. |
| J. W. Herrmann, N. Chandrasekaran, B. F. Conaghan, M. Q. Nguyen, G. W.
Rubloff, R. Z. Shi, "Evaluating the Impact Of Process Changes On
Cluster Tool Performance," IEEE Transactions on Semiconductor
Manufacturing, Vol. 13, No. 2, 181-192, 2000. |
| J. W. Herrmann and M. M. Chincholkar, "Reducing Throughput Time
During Product Design," Journal of Manufacturing Systems, Journal of
Manufacturing Systems, Vol. 20, No. 6, 416-428, 2002. |
| D. T. Hicks, " Time-Based Competition: Evaluating Time-To-market as a
Future Factory Manufacturing Concept," SEMATECH Technology Transfer
#95012673A-XFR, 1995. |
| Joo-Pyo Hong, Jung-Kyoo Kim, Jae-Hyun Han, and Seung-Ki Chae, "Throughput Analysis and Productivity Enhancement for CVD Equipment," IEEE 2004 Advanced Semiconductor Manufacturing Conference (ASMC '04), 48-51, 2004. Authors are from Semicond. Bus., Samsung Electron. Co. Ltd., Gyeonggi-Do, South Korea. |
| S. H. Huang, J. P. Dismukes, J. Shi, Q. Su, M. A. Razzak, R. Bodhale, D.
E. Robinson, "Manufacturing Productivity Improvement Using
Effectiveness Metrics And Simulation Analysis," International Journal
of Production Research, Vol. 41, No. 3, 513-527, 2003. |
| S. H. Huang, J. P. Dismukes, J. Shi, Q. Su, G. Wang, M. A. Razzak, and D.
E. Robinson, "Manufacturing System Modeling For Productivity
Improvement," Journal of Manufacturing Systems, Vol. 21, No. 4,
249-259, 2002. |
| C. M. Huettner and H. J. Steudel, "Analysis of a Manufacturing System
Via Spreadsheet Analysis, Rapid Modelling, and Manufacturing
Simulation," International Journal of Production Research, Vol. 30, No.
7, 1699-1714, 1992. |
| Y. F. Hung and R. C. Leachman, "Reduced Simulation Models of Wafer
Fabrication Facilities," International Journal of Production Research,
Vol. 37, No. 12, 2685-2701, 1999. |
| J. Hunter, D. Delp, D. Collins, and J. Si, "Understanding a
Semiconductor Process using a Full-Scale Model," IEEE Transactions on
Semiconductor Manufacturing, Vol. 15, No. 2, 285-289, 2002. |
| M. D. Jeng, X. L. Xie, and S. W. Chou, "Modeling, Qualitative
Analysis, and Performance Evaluation of the Etching Area In An IC Wafer
Fabrication System Using Petri Nets, IEEE Transactions on Semiconductor
Manufacturing, Vol. 11, No. 3, 358-373, 1998. |
| K. Y. Jeong and D. T. Phillips, "Operational efficiency and
effectiveness measurement," International Journal of Operations and
Production Management, Vol. 21, No. 11, 1404-1416, 2001. |
| P. Jonsson and M. Lesshammar, "Evaluation and Improvement of
Manufacturing Performance Measurement Systems - The Role of OEE,"
International Journal of Operations and Production Management, Vol. 19, No.
1, 55-78, 1999. |
| Y. Karzhavin, Productivity Improvement Focus at White Oak Semiconductor, IEEE 2000 Advanced Semiconductor Manufacturing Conference (ASMC '00), 459-465, 2000. The author is from White Oak Semiconductor, Sandston, VA. |
| Y. D. Kim, D. H. Lee, J. U. Kim, and H. K. Roh, "A Simulation Study
On Lot Release Control, Mask Scheduling, And Batch Scheduling In
Semiconductor Wafer Fabrication Facilities," Journal of Manufacturing
Systems, Vol. 17, No. 2, 107-117, 1998. |
| E. J. Koehler, T. M. Wulf, A. C. Bruska, and M. S. Seppanen,
"valuation Of Cluster Tool Throughput For Thin Film Head
Production," Proceedings of the 1999 Winter Simulation Conference,
1999. |
| J. Konopka, W. Trybula, "Overall Equipment Effectiveness (OEE) And
Cost Measurement," Proceedings of the Nineteenth IEEE/CPMT
International Electronics Manufacturing Technology Symposium, Austin, TX,
137-140, 1996. |
| C. Kraft, "Semiconductor Business, Process, Product and Fab Influence
on Throughput, Cycle Time, and Chip Cost," Proceedings of the 1996
IEEE/SEMI Advanced Semiconductor Manufacturing Conference, Cambridge, MA,
119-139, 1996. |
| R. C. Leachman, "Closed-Loop Measurement of Equipment Efficiency and
Equipment Capacity," 1995 IEEE/SEMI Advanced Semiconductor
Manufacturing Conference, 115-126. Also published in IEEE Transactions on
Semiconductor Manufacturing, Vol. 10, No. 1, 84-97, 1997. |
| R. C. Leachman, editor, "The Competitive Semiconductor Manufacturing
Survey: Third Report on Results of the Main Phase," Report No. CSM-31,
Engineering Systems Research Center, the University of California at
Berkeley, 1996. |
| R. C. Leachman and D. A. Hodges, "Benchmarking Semiconductor
Manufacturing," IEEE Transactions on Semiconductor Manufacturing, Vol.
9, No. 2, 158-169, 1996. |
| Y-F Lee, "The Development and Applications of Advanced Simulation
Platforms for Wafer Foundry Fab with Petri Nets," Proceedings of the
2004 International Symposium on Semiconductor Manufacturing (ISSM 2004),
Tokyo, Japan, 2004. |
| P. Lendermann and B. P. Gan, H. K. Tan, Y. L. Loh, S. K. Lieu (Chartered
Semiconductor Manufacturing), L. F. McGinnis and J. W. Fowler,
"Analysis of a Borderless Fab Scenario in a Distributed Simulation
Testbed," Proceedings of the 2004 Winter Simulation Conference,
Washington, DC, Dec. 5-8, 2004. |
| M.-H. Lin and L.-C. Fu, "Modelling, Control and Simulation of an
Integrated Circuit Wafer Fabrication System: A Generalized Stochastic
Coloured Timed Petri Net Approach," International Journal of Production
Research, Vol. 38, No. 14, 3305-3341, 2000. |
| O. Ljungberg, "Measurement of Overall Equipment Effectiveness as A
Basis for TPM Activities," International Journal of Operations and
Production Management, Vol. 18, No. 5-6, 495-507, 1998. |
| A. Lockamy and M. S. Spencer, "Performance Measurement In A Theory Of
Constraints Environment," International Journal of Production Research,
Vol. 36, No. 8, 2045-2060, 1998. |
| E. Long, A. Misra, and J. Sztipanovits, "Increasing Productivity at
Saturn," IEEE Computer Magazine, August 1998, 35-43. |
| M. J. Lopez and S. C. Wood, "Systems of Multiple Cluster Tools:
Configuration and Performance under Perfect Reliability," IEEE
Transactions on Semiconductor Manufacturing, Vol. 11, No. 3, 465-474, 1998. |
| M. J. Lopez and S. C. Wood, "Systems of Multiple Cluster Tools:
Configuration, Reliability and Performance," IEEE Transactions on
Semiconductor Manufacturing, Vol. 16, No. 2, 170-178, 2003. |
| G. T. Mackulak and P. Savory, "A Simulation-Based Experiment for
Comparing AMHS Performance in a Semiconductor Fabrication Facility,"
IEEE Transactions on Semiconductor Manufacturing, Vol. 14, No. 3, 273-280,
2001. |
| J. Mapes, C. New, and M. Szwejczewski, "Performance Trade-Offs In
Manufacturing Plants," International Journal of Operations &
Production Management, Vol. 17, No. 9-10, 1020-1033, 1997. |
| S. J. Mason, "A Comparative Study of Four Factory Performance
Simulators," Master's Thesis, Department of Operations Research, The
University of Texas at Austin, 1995. |
| A. Matsuyama and R. W. Atherton, "Experience in Simulating Wafer Fabs
in the USA and Japan," Proceedings of the 1990 IEEE/SEMI International
Semiconductor Manufacturing Science Symposium, 113-118, 1990. |
| K. E. McKone, R. G. Schroeder, and K. O. Cua, "The Impact Of Total
Productive Maintenance Practices On Manufacturing Performance," Journal
of Operations Management, Vol. 19, No. 1, 39-58, 2001. |
| D. J. Miller, "Simulation of a Semiconductor Manufacturing
Line," Communications of the ACM, Vol. 33, No. 10, 98-108, 1990. |
| J. Miltenburg, and D. Sparling, "Managing And Reducing Total Cycle
Time: Models And Analysis," International Journal of Production
Economics, Vol. 46-47, 89-108, 1996. |
| M. Mittler, N. Gerlich and A. K. Schoemig, "On Cycle Times and
Interdeparture Times in Semiconductor Manufacturing," Report No. 124,
Institute of Computer Science Research Report Series, University of
Wuerzburg, 1995. |
| L. Monch, O. Rose, and R. Sturm, "Framework for the Performance
Assessment of Shop-Floor Control Systems," Proceedings of the
International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A.
Schoemig, Tempe, AZ, April 10-12, 2002. 95-100. |
| L. Mönch and J. Zimmermann, "Improving the Performance of
Dispatching Rules in Semiconductor Manufacturing by Iterative
Simulation," Proceedings of the 2004 Winter Simulation Conference,
Washington, DC, Dec. 5-8, 2004. |
| M. Morita and E. J. Flynn, "The Linkage Among Management Systems,
Practices And Behaviour In Successful Manufacturing Strategy,"
International Journal of Operations & Production Management, Vol. 17,
No. 9-10, 967-993, 1997. |
| A. Najmi, "Management of Cycle Time in Semiconductor Wafer
Fabrication," Engineering Systems Research Center, Report No. 93-3, the
University of California at Berkeley, 1993. |
| S. Nakamura, C. Hashimoto, and O. Mori, "Precise and Flexible
Modeling for Semiconductor Wafer Fabrication," Proceedings of the 1993
Winter Simulation Conference, (eds.) G.W. Evans, M. Mollaghasemi, E. C.
Russel, and W.E. Biles, 804-813, 1993. |
| S. Nakamura, C. Hashimoto, O. Mori, and J. Nose, "Discrete-Event
Simulator for Evaluation of Line Performance of Semiconductor Manufacturing
Lines," NTT LSI and Network Information System Laboratories, presented
at SEMICON Japan, 1992. |
| N. Nayani (Cirent) and M. Mollaghasemi (Univ. of Central Florida),
"Validation and Verification of the Simulation Model of a
Photolithography Process in Semiconductor Manufacturing," Proceedings
of the 1998 Winter Simulation Conference, D.J. Medeiros, E.F. Watson, J.S.
Carson and M.S. Manivannan, eds., 1998. |
| J. M. Neve, F. D. Ray and J. P. Sitarik, "Improving the Performance
of an Integrated Circuit Manufacturing Line," AT&T Technical
Journal, Vol. 66, No. 5, 39-48, 1987. |
| P. O'Neil, "Performance Evaluation of Lot Dispatching and Scheduling
Algorithms Through Discrete Event Simulation," Proceedings of the 3rd
International Semiconductor Manufacturing Science Symposium, Burlington, CA,
21-24, 1991. |
| S. Pampel, J. Domaschke, and H. Jetter, "Productivity Improvement For
Dry Etch Equipment Through The Application Of Simulation," Proceeding
of the 2000 International Symposium on Semiconductor Manufacturing (ISSM
2000), 2000. |
| K. Pare, U. Dierks, and H. T. LeBaron, "Using Simulation to
Understand and Improve Process Tool Efficiency," Proceedings of the
International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A.
Schoemig, Tempe, AZ, April 10-12, 2002. 46-51. |
| D. E. Pederson and C. E Trout, "Demonstrated Benefits of Cluster Tool
Simulation," Proceedings of the International Conference on Modeling
and Analysis of Semiconductor Manufacturing (MASM 2002), Editors G. T.
Mackulak, J. W. Fowler, and A. Schoemig, Tempe, AZ, April 10-12, 2002.
58-63. |
| A. Peikert and S. Brown, "A Rapid Modeling Technique for Measurable
Improvements in Factory Performance", Proceedings of the 1998 Winter
Simulation Conference, Washington, DC, D. J. Medeiros, E. F. Watson, J. S.
Carson, and M. S. Manivannan, eds., 1011-1015. |
| T. L. Perkinson, R. S. Gyurcsik, and P. K. McLarty, "Single-Wafer
Cluster Tool Performance: An Analysis of the Effects of Redundant Chambers
and Revisitation Sequences on Throughput," IEEE Transactions on
Semiconductor Manufacturing, Vol. 9, No. 3, 384-400, 1996. |
| D. D. Pillai, E. L. Bass, J. C. Dempsey, and E. J. Yellig, "300-mm Full-Factory Simulations for 90- and 65-Nm IC Manufacturing," IEEE Transactions on Semiconductor Manufacturing, Vol. 17, No. 3, 292-298, 2004. Authors are from Intel Corp., Chandler, AZ, USA. |
| Rajesh Piplani and Sen Ann Puah, "Simplification Strategies for Simulation Models of Semiconductor Facilities," Journal of Manufacturing Technology Management, Vol. 15, No. 7, 618-625, 2004. |
| K.A. Pitts, "Discrete-Event Simulation Of Wafer Fabrication
Facility", Proceedings of the 1988 Winter Simulation Conference, M.
Abrams, P. Haigh, and J. Comfort (eds.), pp. 712-718, 1988. |
| L. Pivin, "Utilizing SEMI Standards to Improve Overall Equipment
Effectiveness for Semiconductor Equipment," Proceedings of the
International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A.
Schoemig, Tempe, AZ, April 10-12, 2002. 14-23. |
| K. Potti and S. J. Mason, "Using Simulation to Improve Semiconductor
Manufacturing," Semiconductor International, 289-292, July 1997. |
| A. Raman and D. Pillai, "E-Diagnostics: A Secure and Cost-Effective
Method to Increase Factory Equipment Productivity," Proceedings of the
International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A.
Schoemig, Tempe, AZ, April 10-12, 2002. 52-57. |
| H. Rantanen, "Internal Obstacles Restraining Productivity Improvement
In Small Finnish Industrial Enterprises," International Journal of
Production Economics, Vol. 69, No. 1, 85-91, 2001. |
| M. A. Razzak, G. Daley, and J. P. Dismukes, "Factory Level Metrics:
Basis for Productivity Improvement," Proceedings of the International
Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM
2002), Editors G. T. Mackulak, J. W. Fowler, and A. Schoemig, Tempe, AZ,
April 10-12, 2002. 158-162. |
| T. M. Robert, S. A. Fischbein, M. Janakiram, and L. W. Schruben,
"Resource-Driven and Job-Driven Simulations," Proceedings of the
International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A.
Schoemig, Tempe, AZ, April 10-12, 2002. 78-83. |
| S. Robinson and M. Pidd, "Provider And Customer Expectations Of
Successful Simulation Projects," Journal of the Operational Research
Society, Vol. 49, No. 3, 200-209, 1998. |
| A. J. de Ron and J. E. Rooda, "Equipment Effectiveness: OEE Revisited," IEEE Transactions on Semiconductor Manufacturing, Vol. 18, No. 1, 190-196, 2005. |
| B. R. Sarker and J. A. Fitzsimmons, "The Performance of Push and Pull
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| L. Sattler, C. R. Glassey, and B. I. Saeed, "Benchmarking
Semiconductor Manufacturing Performance Using a Pairwise-Comparison
Method," IEEE Transactions on Semiconductor Manufacturing, Vol. 10, No.
2, 317-321, 1997. |
| W. Scholl and J. Domaschke, "Implementation Of Modeling And
Simulation In Semiconductor Wafer Fabrication With Time Constraints Between
Wet Etch And Furnace Operations," IEEE Transactions on Semiconductor
Manufacturing, Vol. 13, No. 3, 273-277, 2000. |
| S. T. Shikalgar and D. Fronckowiak (IBM) and E. A. MacNair (IBM T.J.
Watson Research Center), "Application of Cluster Tool Modeling to a 300
mm Fab Simulation," Proceedings of the 2003 Winter Simulation
Conference, S. Chick, P. J. Sánchez, D. Ferrin, and D. J. Morrice, eds.,
2003. |
| R. S. Srinivasan, "Modeling and Performance Analysis of Cluster Tools
Using Petri Nets, IEEE Transactions on Semiconductor Manufacturing, Vol. 11,
No. 3, 394-403, 1998. |
| R. Sturm, J. Dorner, K. Reddig, J. Seidelmann, "Simulation-based
Evaluation of the Ramp-up Behavior of Waferfabs," Proceedings of the
14th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and
Workshop, Munich, Germany, 2003. |
| Q. Su, J. P. Dismukes, M. A. Razzak, and V. A. Ames, "Metrics for
Measuring Productivity of Flexible-Sequence Cluster Tools," Proceedings
of the International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A.
Schoemig, Tempe, AZ, April 10-12, 2002. 3-13. |
| R. Suri, D. Derleth and M. Tomsicek, (and O. Balci, R. P. Sadowski, and R.
E. Nance, eds.) "Modeling Manufacturing Systems Using ManuPlan and
Simstarter- A Tutorial," Proceedings of the 1990 Winter Simulation
Conference. 168-176. |
| W. J. Trybula and Margaret Pratt, "Applying SEMI E10 Guidelines to
Manufacturing," IEEE/CPMT International Electronics Manufacturing
Technology Symposium. |
| M.-H. Tsai, K.-S. Huang, G. Yo, and C. D. Chen, "Using TOC and
Equipment Simulation Model to Resolve the Process Allocation Problem of
Multi-Chamber Equipment in FAB Manufacturing," Proceedings of the 2002
International Symposium on Semiconductor Manufacturing (ISSM2002), Tokyo,
Japan, 2002. |
| B. Tullis, V. Mehrotra, and D. Zuanich, "Successful Modeling of a
Semiconductor R&D Facility," Proceedings of the 1990 IEEE/SEMI
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