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A Bibliography on Capacity Modeling for Semiconductor Manufacturing
Section 14: Failures and Maintenance
 | Shamsuddin Ahmed, Masjuki Hj. Hassan, and Zahari Taha, "TPM Can Go beyond Maintenance: Excerpt from a Case Implementation," Journal of Quality in Maintenance Engineering, Vol. 11, No. 1, 19-42, 2005. |
| A. Aissani and J. R. Artalejo, "On The Single Server Retrial Queue
Subject To Breakdowns," Queueing Systems, Vol. 30, No. 3-4, 309-321,
1998. |
| R. Akella, B. H. Krogh and M. R. Singh, "Efficient Computation of
Coordinating Controls in Hierarchical Structures for Failure-Prone
Multi-Cell Flexible Assembly Systems," IEEE Transactions on Robotics
and Automation, Vol. 6, No. 6, 659-672, 1990. |
| R. Akella and P. R. Kumar, "Optimal Control of Production Rate in a
Failure Prone Manufacturing System," IEEE Transactions on Automatic
Control, Vol. AC-31, No. 2, 116-126, 1986. |
| B. Avi-Itzhak and P. Naor, "Some Queueing Problems with the Service
Station Subject to Breakdown," Operations Research, Vol. 11, May-June
1963. |
| S. S. Baum and C. M. O'Donnell, "An Approach to Modeling Labor and
Machine Down Time in Semiconductor Fabrication," Proceedings of the
1991 Winter Simulation Conference, (eds.) B. L. Nelson, W. D. Kelton, G. M.
Clark, 448-454, 1991. |
| M. Bruggemann, "Interrupt Reduction by Triggering of Maintenance Activities Using APC Machine Alarm Analysis," IEEE 2004 Advanced Semiconductor Manufacturing Conference (ASMC '04), 57-60, 2004. Author is from Infineon Technol. AG, Munich, Germany. |
| K.-T. Chang, O. Yu, H.W. Chang, Z. Su, and K.-s. Huang, "Automatic
Commanding System for Periodic Shut Down & Recovery Plan - Using Real
Time Dispatcher to Execute Annual Prevention Maintenance," Proceedings
of the 2002 International Symposium on Semiconductor Manufacturing
(ISSM2002), Tokyo, Japan, 2002. |
| A. Federgruen and L. Green, "Queueing Systems with Service
Interruptions," Operations Research, Vol. 34, No. 5, 752-768, 1986. |
| R. W. Freck, "Using Overall Equipment Effectiveness (OEE) and the Equipment Improvement Process (ET) to Improve Fab Throughput," IEEE 2000 Advanced Semiconductor Manufacturing Conference (ASMC '00), 469-471, 2000. The authors are from Resource Dynamics Int., Boca Raton, FL. |
| J. Homer, "Macro- and Micro-Modeling of Field Service Dynamics,"
System Dynamics Review, Vol. 15, No. 2, 139-162, 1999. |
| W. J. Hopp and S-C Wu, "Machine Maintenance with Multiple Maintenance
Actions," IIE Transactions, Vol. 22, No. 3, 226-233, 1990. |
| K. C. Jeong and Y. D. Kim, "Performance Analysis Of
Assembly/Disassembly Systems With Unreliable Machines And Random Processing
Times," IIE Transactions, Vol. 30, No. 1, 101-106, 1998. |
| D. Killeen, P. Gaboury, and D. Paccard, "Measuring and Improving Equipment Capacity and Overall Equipment Efficiency (OEE) using iPLUS," 2001 IEEE International Symposium on Semiconductor Manufacturing (ISSM '01), 25-29, 2001. The authors are from STMicroelectronics, Phoenix, AZ. |
| C. P. Koulamas, "Job Flow-Time in a Job Shop subject to Machine
Breakdowns with Applications in Modeling Job Shop In-Process
Inventories," International Journal on System Sciences, Vol. 21, No. 3,
479-486, 1990. |
| S. Lantz, "An Effective Methodology for Improving Equipment Reliability and Reducing Excursions During a Factory Ramp," IEEE 2003 Advanced Semiconductor Manufacturing Conference (ASMC '03), 297-302, 2003. Intel Corp., Hillsboro, OR, USA. |
| A. M. Law, "Models of Random Machine Downtimes for Simulation,"
Proceedings of the 1990 Winter Simulation Conference, 314-317, 1990. |
| C. Y. Lee and C. S. Lin, "Single-Machine Scheduling with Maintenance
and Repair Rate-Modifying Activities," European Journal of Operational
Research, Vol. 135, No. 3, 493-513, 2001. |
| C. J. Liao and W. J. Chen, "Single-Machine Scheduling with Periodic
Maintenance and Nonresumable Jobs," Computers & Operations
Research, Vol. 30, No. 9, 1335-1347, 2003. |
| O. Z. Maimon and S. B. Gershwin, "Dynamic Scheduling and Routing for
Flexible Manufacturing Systems That Have Unreliable Machines,"
Operations Research, Vol. 36, No. 2, 279-292, 1988. |
| B. Mandelbrot, "Self-Similar Error Clusters in Communication Systems
and the Concept of Conditional Stationarity," IEEE Transactions of
Communication Technology, 71-90, 1964. |
| T. J. Massie, "Semiconductor Fab Maintenance Challenge and BKM in Downturn Economy," IEEE 2002 Advanced Semiconductor Manufacturing Conference (ASMC '02), 228-230, 2002. The author is from Microelectron. Div., IBM Corp., Essex Junction, VT. |
| Y. Mikata, "Improvement of Fab Availability Simulation by using
Semi-Dynamical Model," Proceedings of the 2004 International Symposium
on Semiconductor Manufacturing (ISSM 2004), Tokyo, Japan, 2004. |
| Y. Mikata, K. Tanimoto, K. Ishii, and S. Oka, "Improvement of Mini-Fab Uptime by Using Multitask and Multifunctional Tools," IEEE Transactions on Semiconductor Manufacturing, Vol. 17, No. 3, 273-280, 2004. Authors are from HALCA Project, Assoc. of Super-Adv. Electron. Technol. (ASET), Ibaraki, Japan. |
| T. D. Rishel and D. P. Christy, "Incorporating Maintenance Activities
into Production Planning: Integration at the Master Schedule Versus Material
Requirements Level," International Journal of Production Research, Vol.
34, No. 2, 421-446, 1996. |
| O. Rose, "Modeling Tool Failures in Semiconductor Fab
Simulation," Proceedings of the 2004 Winter Simulation Conference,
Washington, DC, Dec. 5-8, 2004. |
| C. R. Schultz and R. A. Reid, "Spare Parts Inventory and Cycle Time
Reduction," International Journal of Production Research, Vol. 42, No.
4, 759-776, 2004. |
| SEMI, "SEMI E10-92: Guideline for Definition and Measurement of
Equipment Reliability, Availability, and Maintainability (RAM). |
| T. W. Sloan and J. G. Shanthikumar, "Combined Production and
Maintenance Scheduling for a Multiple-Product, Single Machine Production
System," Production and Operations Management, Vol. 9, No. 4, 379-399,
2000. |
| R. Varra, "Protecting Process Equipment from Cyber Security
Threats," Proceedings of the 2004 International Symposium on
Semiconductor Manufacturing (ISSM 2004), Tokyo, Japan, 2004. |
| M. Vineyard, K. Amoako-Gyampah, J. R. Meredith, "Failure Rate
Distributions for Flexible Manufacturing Systems: An Empirical Study,"
European Journal of Operational Research, Vol. 116, No. 1, 139-155, 1999. |
| Xiaodong Yao, E. Fernandez-Gaucherand, M. C. Fu, and S. I. Marcus, "Optimal Preventive Maintenance Scheduling in Semiconductor Manufacturing," IEEE Transactions on Semiconductor Manufacturing, Vol. 17, No. 3, 345-356, 2004. Authors are from SAS Inst. Inc., Cary, NC, USA. |
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