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A Bibliography on Capacity Modeling for Semiconductor Manufacturing
Section 13: Facility Layout, Location, and AMHS Design
 | K. M. Adusumilli and R. L. Wright, "Comparative Factory Analysis of
Standard Foup Capacities," Proceedings of the 2004 Winter Simulation
Conference, Washington, DC, Dec. 5-8, 2004. |
| R. G. Askin and M. G. Mitwasi, "Integrating Facility Layout with
Process Selection and Capacity Planning," European Journal of
Operational Research, Vol. 57, No. 2, 162-173, 1992. |
| H. Aytug, A. Barua, M. Lawley, and R. Uzsoy, "Observations On The
Interactions Among Deadlock Avoidance Policies And Dispatching Rules In
Automated Manufacturing Systems," International Journal of Production
Research, Vol. 41, No. 1, 81-95, 2003. |
| W. Carriker, "Intel 300 mm Fab Layout and Material Handling Automation Integration Learning," IEEE 2004 Advanced Semiconductor Manufacturing Conference (ASMC '04), 257-261, 2004. Authors are from LTD Autom., Intel Corp., Hillsboro, OR, USA. |
| C.F. Chang and S.K. Chang, "A Layer-Based Layout Approach for
Semiconductor Fabrication Facilities," 1998 IEEE SEMI Advanced
Semiconductor Manufacturing Conference And Workshop, 385-390, 1998. |
| J. Chang and Yung Cheng, "Just-in-Time AMHS Delivery for 300 mm FAB," Proceedings of the 2004 Semiconductor Manufacturing Technology Conference, 25-28, 2004. The authors are from Inst. of Manuf. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan. |
| D. W. Collins, L. D'Arcy, and B. Franklin, "Simulation Model Analysis
of AMHS w/Area Elevators for an 8 inch Wafer FAB," Proceedings of the
International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A.
Schoemig, Tempe, AZ, April 10-12, 2002. 246-251. |
| C. D. Geiger, R. Hase, C. G. Takoudis, and R. Uzsoy, "Alternative
Facility Layouts for Semiconductor Wafer Fabrication Facilities," IEEE
Transactions on Components, Packaging, and Manufacturing Technology. Part C:
Manufacturing, Vol. 20, No. 2, 152-163, 1997. |
| R. A. Giddings and J. C. Hunter, "Pervasive Integrated Material Handling in 300 mm Semiconductor Manufacturing," IEEE 2004 Advanced Semiconductor Manufacturing Conference (ASMC '04), 274-278, 2004. Authors are from Logic Technol. Dev., Intel Corp., Hillsboro, OR, USA. |
| D. Gluer, "Optimization of Automated Material Handling Systems Regarding Robustness and Delivery Time," IEEE 2003 Advanced Semiconductor Manufacturing Conference (ASMC '03), 32-35, 2003. AMD Saxony LLC & Co. KG, Dresden, Germany. |
| R. Hase, C. G. Takoudis and R. Uzsoy, "Cellular and Reentrant Layouts
for Semiconductor Wafer Fabrication Facilities," 1994 IEEE/CPMT
International Electronics Manufacturing Technology Symposium. |
| S. Hsieh and C. R. Hung, "Feasibility Study of Modular Plant for 300
mm-IC Fabrications," Journal of Intelligent Manufacturing, Vol. 15, No.
2, 233-244, 2004. |
| S. Huang, "Layout Decision Support System for Semiconductor
Manufacturing," Proceedings of the 2004 International Symposium on
Semiconductor Manufacturing (ISSM 2004), Tokyo, Japan, 2004. |
| T. Kato, "Advanced Reticle Carrier System for 90nm Process in a 300mm
Wafer Fabrication," Proceedings of the 2004 International Symposium on
Semiconductor Manufacturing (ISSM 2004), Tokyo, Japan, 2004. |
| M. Kobayashi, T. Makita, S. Matsui, M. Koyama, N. Fujii, I. Hatono, K. Ueda, "Floor Layout Planning Method Based on Self-Organization," 2001 IEEE International Symposium on Semiconductor Manufacturing (ISSM '01), 381-384, 2001. The authors are from Sony Corp. |
| H. Kondo, "Estimation of Influence that AMHS Delivery Time has on
Productivity of Full-Automated Fab Line," Proceedings of the 2004
International Symposium on Semiconductor Manufacturing (ISSM 2004), Tokyo,
Japan, 2004. |
| M. E. Kuhl and J. Christopher, "Capacity Analysis of Automated
Material Handling Systems in Semiconductor Fabs," Proceedings of the
2004 Winter Simulation Conference, Washington, DC, Dec. 5-8, 2004. |
| T. A. Lacksonen and C. Y. Hung, "Project Scheduling Algorithms For
Re-Layout Projects," IIE Transactions, Vol. 30, No. 1, 101-106, 1998. |
| Bo Li, J. Wu, W. Carriker, and R. Giddings, "Factory Throughput Improvements through Intelligent Integrated Delivery in Semiconductor Fabrication Facilities," IEEE Transactions on Semiconductor Manufacturing, Vol. 18, No. 1, 222-231, 2005. Authors are from Autom. Dept. of Portland Technol. Dev., Intel Corp., Hillsboro, OR, USA. |
| Da-Yin Liao and Chia-Nan Wang, "Neural-Network-Based Delivery Time Estimates for Prioritized 300-mm Automatic Material Handling Operations," IEEE Transactions on Semiconductor Manufacturing, Vol. 17, No. 3, 324-332, 2004. Authors are from Dept. of Inf. Manage., Nat. Chi-Nan Univ., Nantou, Taiwan. |
| J. T. Lin, F. K. Wang, C. K. Wu, "Connecting Transport AMHS in a
Wafer Fab," International Journal of Production Research, Vol. 41, No.
3, 529-544, 2003. |
| J. T. Lin, F. K. Wang, C. K. Wu, "Simulation Analysis of the
Connecting Transport AMHS in a Wafer Fab," IEEE Transactions on
Semiconductor Manufacturing, Vol. 16, No. 3, 555-564, 2003. |
| J. T. Lin, F. K. Wang, and J. R. Young, "Virtual Vehicle in the Connecting Transport Automated Material-Handling System (AMHS)", International Journal of Production Research, Vol. 42, No. 13, 2599-2610, 2004. |
| J. T. Lin, F.-K. Wang, and P.-Y. Yung, "Simulation Analysis of
Dispatching Rules for an Automated Interbay Material Handling System in
Wafer Fabrication," International Journal of Production Research, Vol.
39, No. 6, 1221-1238, 2001. |
| L. A. Martin-Vega, M. Pippen, E. Gerdon, and R. Burcham, "Applying
Just-In-Time in a Wafer Fab: A Case Study," IEEE Transactions on
Semiconductor Manufacturing, Vol. 2, No. 1, 16-21, 1989. |
| R. D. Meller, "The Multi-Bay Manufacturing Facility Layout
Problem," International Journal of Production Research, Vol. 35, No. 5,
1229-1237, 1997. |
| D. Miller, C. Menser, and B. Gustafson, "Improving Material Logistics Via Automation in an Existing Semiconductor Fab," IEEE 2004 Advanced Semiconductor Manufacturing Conference (ASMC '04), 252-256, 2004. Authors are from IBM Microelectron., Essex Junction, VT, USA. |
| A. M. Murray and D. J. Miller (IBM Microelectronics), "Automated
Reticle Handling: A Comparison of Distributed and Centralized Reticle
Storage and Transport," Proceedings of the 2003 Winter Simulation
Conference, S. Chick, P. J. Sánchez, D. Ferrin, and D. J. Morrice, eds.,
2003. |
| Y. S. Myung, H. G. Kim, D. W. Tcha, "A Bi-Objective Uncapacitated
Facility Location Problem," European Journal of Operational Research,
Vol. 100, No. 3, 608-616, 1997. |
| D. Nazzal and D. A. Bodner (Georgia Institute of Technology), "A
Simulation-Based Design Framework for Automated Material Handling Systems in
300mm Fabrication Facilities," Proceedings of the 2003 Winter
Simulation Conference, S. Chick, P. J. Sánchez, D. Ferrin, and D. J.
Morrice, eds., 2003. |
| I. Paprotny and W. Hellinck, "Streamlining the Fab Design Process
Through Rapid Modeling and Design Environment (RMDE)," Proceedings of
the International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A.
Schoemig, Tempe, AZ, April 10-12, 2002. 126-130. |
| B. A. Peters and T. Yang, "Integrated Facility Layout and Material
Handling System Design in Semiconductor Fabrication Facilities," IEEE
Transactions on Semiconductor Manufacturing, Vol. 10, No. 3, 360-369, 1997. |
| B. A. Peters, T. Yang, and M. Rajasekharan, "Semiconductor
Fabrication Facility Design using A Hybrid Search Methodology,"
Computers and Industrial Engineering, Vol. 36, No. 3, 565-583, 1999. |
| P. Qu, S. J. Mason, and E. Kutanoglu, "Scheduling Jobs Containing
Multiple Orders," Proceedings of the International Conference on
Modeling and Analysis of Semiconductor Manufacturing (MASM 2002), Editors G.
T. Mackulak, J. W. Fowler, and A. Schoemig, Tempe, AZ, April 10-12, 2002.
264-269. |
| T. M Roeder, N. Govind and L. W. Schruben, "A Queueing Network
Approximation of Semiconductor Automated Material Handling Systems: How Much
Information do we Really Need?," Proceedings of the 2004 Winter
Simulation Conference, Washington, DC, Dec. 5-8, 2004. |
| M. Ronney, M. van der Burgt, T. Smit, J. E. Rooda, "Capacity Calculation of an AGV System in a MP2 Wafer Fab by Means of Simulation," 2001 IEEE International Symposium on Semiconductor Manufacturing (ISSM '01), 385-388, 2001. The authors are from Eindhoven Univ. of Technol. |
| K. Rust, R. Wright, and M. Shopbell, "Comparative Analysis of 300mm
Automated Material Handling Systems (AMHS)," Proceedings of the
International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A.
Schoemig, Tempe, AZ, April 10-12, 2002. 240-245. |
| C. Sheridan and T. Jefferson, "Real Life Challenges of Enabling Automated Operations in a Technology Development Environment," IEEE 2004 Advanced Semiconductor Manufacturing Conference (ASMC '04), 32-35, 2004. Authors are from Intel Corporation. |
| J. Spatta, and D. Rettke, "Visual Communication of an Integrated
Schedule," Proceedings of the 2002 International Symposium on
Semiconductor Manufacturing (ISSM2002), Tokyo, Japan, 2002. |
| J. Steele, "An Algorithm for Estimating the Performance of an
Automated Material Handling System for the Semiconductor Industry,"
Proceedings of the International Conference on Modeling and Analysis of
Semiconductor Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W.
Fowler, and A. Schoemig, Tempe, AZ, April 10-12, 2002. 229-234. |
| R. Sturm, K. Reddig, and D. Gluer, "Robustness Evaluation and
Improvement Method for Automated Material Handling Systems,"
Semiconductor FabTech - 21st Edition, 38-47, 2004. |
| R. Sturm, J. Seidelmann, J. Dorner, and K. Reddig (Fraunhofer IPA),
"An Approach to Robust Layout Planning of AMHS," Proceedings of
the 2003 Winter Simulation Conference, S. Chick, P. J. Sánchez, D. Ferrin,
and D. J. Morrice, eds., 2003. |
| F. Tausch and L. Hennessy, "Evaluation and Comparison of a Car-Based
vs. a CFT Material Handling System for a 300mm Fab," Proceedings of the
International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A.
Schoemig, Tempe, AZ, April 10-12, 2002. 235-239. |
| J. H. Ting and J. M .A. Tanchoco, "Optimal Bidirectional Spine Layout
for Overhead Material Handling Systems," IEEE Transactions on
Semiconductor Manufacturing, Vol. 14, No. 1, 57-64, 2001. |
| J.-H. Ting and J. M. A. Tanchoco, "Unidirectional Circular Layout for
Overhead Material Handling Systems," International Journal of
Production Research, Vol. 38, No. 16, 3913-3935, 2000. |
| J. C. Tyan, T. C. Du, J. C. Chen, and I. H. Chang, "Multiple Response
Optimization in a Fully Automated FAB: An Integrated Tool and Vehicle
Dispatching Strategy," Computers & Industrial Engineering, Vol. 46,
No. 1, 121-139, 2004. |
| R. Uzsoy and C. G. Takoudis, "Scheduling and Facility Design for
Semiconductor Manufacturing," Purdue University, School of Industrial
Engineering. |
| T. Wakabayashi, S. Watanabe, Y. Kobayashi, T. Okabe, T. and A. Koike, "High-Speed AMHS and its Operation Method for 300-mm QTAT Fab," IEEE Transactions on Semiconductor Manufacturing, Vol. 17, No. 3, 86-93, 2004. Authors are from Trecenti Technol. Inc., Ibaraki, Japan. |
| M. J. J. Wang, H. C. Chung, H. C. Wu, "The Evaluation of Manual FOUP
Handling in 300-mm Wafer Fab," IEEE Transactions on Semiconductor
Manufacturing, Vol. 16, No. 3, 551-554, 2003. |
| Chia-Nan Wang and Da-Yin Liao, "Prioritized Automatic Material Handling Services in 300 mm Foundry Manufacturing," Proceedings of the 2002 Semiconductor Manufacturing Technology Conference, 109-114, 2002. The authors are from Nat. Chiao Tung Univ., Hsinchu, Taiwan. |
| D. S. Watson and S. Craven, "Automation Challenges for 300mm,"
Proceedings of the 2002 International Symposium on Semiconductor
Manufacturing (ISSM2002), Tokyo, Japan, 2002. |
| K. H. Watson and J. W. Giffin, "The Vertex Splitting Algorithm For
Facilities Layout," International Journal of Production Research, Vol.
35, No. 9, 2477-2492, 1997. |
| R. Wright, C. Cunningham, K. Benhayoune, E. Campbell, V. Swaminathan, R.
White, "300mm Factory Layout and Automated Materials Handling,"
Solid State Technology, Vol. 42, No. 12, 35-40, 1999. |
| R. Wright, "The Economics of Agile Automation for 300mm
Manufacturing," Proceedings of the 2004 International Symposium on
Semiconductor Manufacturing (ISSM 2004), Tokyo, Japan, 2004. |
| T. Yamagishi, "The World's First Automated Reticle Handling System using OHT," 2003 IEEE International Symposium on Semiconductor Manufacturing (ISSM '03), 21-24, 2003. The author is from Seiko Epson Corp., Yamagata, Japan. |
| T. H. Yang and B. A. Peters, "A Spine Layout Design Method For
Semiconductor Fabrication Facilities Containing Automated Material-Handling
Systems," International Journal of Operations & Production
Management, Vol. 17, No. 5-6, 490-501, 426-427, 1997. |
| T. H. Yang, M. Rajasekharan, and B. A. Peters, "Semiconductor
fabrication facility design using a hybrid search methodology,"
Computers & Industrial Engineering, Vol. 36, No. 3, 565-583, 1999. |
| T. H Yang, C. T. Su, and Y. R. Hsu, "Systematic Layout Planning: A
Study On Semiconductor Wafer Fabrication Facilities," International
Journal of Operations and Production Management, Vol. 20, No. 11-12,
1360-1372, 2001. |
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