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A Bibliography on Capacity Modeling for Semiconductor Manufacturing
Section 12: Experimental Design
 | F. Chance, J. K. Robinson, J. Fowler, O. Gihr, B. Rodriguez, and L. W.
Schruben, "A Design of Experiments Methodology for Semiconductor Wafer
Fab Capacity Planning" SEMATECH Technology Transfer #95062860A-TR,
1995. |
| M.M. Hazra, D. J. Morrice and S. K. Park, "A Simulation Clock-Based
Solution To The Frequency Domain Experiment Indexing Problem," IIE
Transactions, Vol. 29, No. 9, 769-782, 1997. |
| S. J. Hood and P. D. Welch, "Experimental Design Issues in Simulation
with Examples from Semiconductor Manufacturing," Proceedings of the
1992 Winter Simulation Conference, (eds.) J. J. Swain, D. Goldsman, R. C.
Crain, and J. R. Wilson, 255-263, 1992. |
| Dima Nazzal and Mansooreh Mollaghasemi and Linda C. Malone,
"Evaluation of the Effectiveness of Group Screening Methods as Compared
to No Group Screening," Proceedings of the 2000 Winter Simulation
Conference, 2000. |
| J. K. Robinson, L. W. Schruben, and J. W. Fowler, "Experimenting with
Large-Scale Semiconductor Manufacturing Simulations: A Frequency Domain
Approach to Factor Screening," Proceedings of the Institute of
Industrial Engineers Research Conference, Los Angeles, CA, 1993. |
| N. Tandon and G. Baweja, "Automated System Infrastructure to Facilitate Design of Experiments (DOE) Data Analysis," IEEE 2002 Advanced Semiconductor Manufacturing Conference (ASMC '02), 59-63, 2002. The authors are from Kilby Center (KFAB) Comput. Eng., Texas Instrum. Inc., Dallas, TX. |
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