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A Bibliography on Capacity Modeling for Semiconductor Manufacturing
Section 9: Data Models
 | S. S. Baum and P. G. Glassey, "Supporting Semiconductor Manufacturing
Simulation Tools Using a Structured Data Model," Proceedings of the
1992 Winter Simulation Conference, (eds.) J. J. Swain, D. Goldsman, R. C.
Crain, and J. R. Wilson, 879-889, 1992. |
| M. Covington and T. Hutchison, "Challenges Of Migrating Legacy Data
To A Distributed Capacity Repository," Texas Instruments Technical
Journal, Vol. 13, No. 4, 30-34, 1996. |
| S. English, and J. W. Morgan, "A Low-Cost Strategy for Managing Tools and Processes through Modeling Basic Parameters and Applying Input SPC to Both Basic Parameters and to Relationships Among Basic Parameters," IEEE 2004 Advanced Semiconductor Manufacturing Conference (ASMC '04), 193-198, 2004. Authors are from STMicroelectronics. |
| B.L. Farrell, W. Kahan, J. W. Reightler, and A. C. Woodard,
"Improving Service Efficiency in Manufacturing Integrated
Circuits," AT&T Technical Journal, 37-44, July/August 1992. |
| M. Fujihara and K. Yoneda, "Simulation Through Explicit State
Description and its Application to Semiconductor Fab Operation,"
Proceedings of the 1992 Winter Simulation Conference, (eds.) J. J. Swain, D.
Goldsman, R. C. Crain, and J. R. Wilson, 899-907, 1992. |
| Min-Hsiung Hung, Fan-Tien Cheng, Sze-Chien Yeh, "Development of a Web-Services-Based E-Diagnostics Framework for Semiconductor Manufacturing Industry," IEEE Transactions on Semiconductor Manufacturing, Vol. 18, No. 1, 122-135, 2005. Authors are from Dept. of Electr. Eng., Nat. Defense Univ., Taiwan. |
| J. Weckman, "Semiconductor Workbench for Integrated Modeling,"
to appear in the IEEE Components, Packaging, Manufacturing Technology
Society (CPMT) Transactions, June 1994. |
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