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A Bibliography on Capacity Modeling for Semiconductor Manufacturing

Section 7: Capacity Modeling

bulletS. Ahmed, "Semiconductor Tool Planning Via Multi-Stage Stochastic Programming," Proceedings of the International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A. Schoemig, Tempe, AZ, April 10-12, 2002. 152-157.
bulletT. Baker and P. Thomas, "Adding Capacity Through Kaizen Blitz," Proceedings of the 2002 International Symposium on Semiconductor Manufacturing (ISSM2002), Tokyo, Japan, 2002.
bulletF. Barahona, S. Bermon, O. Gunluk, and S. Hood, "Robust Capacity Planning in Semiconductor Manufacturing," Naval Research Logistics, Vol. 52, No. 5, 459-468, 2005.
bulletJ. F. Bard, K. Srinivasan, D. Tirupati, "An Optimization Approach To Capacity Expansion In Semiconductor Manufacturing Facilities," International Journal of Production Research, Vol. 37, No. 15, 3359-3382, 1999.
bulletD. L. Benavides, J. R. Duley and B. E. Johnson, "As Good As It Gets: Optimal Fab Design And Deployment," IEEE Transactions on Semiconductor Manufacturing, Vol. 12, No. 3, 281-287, 1999.
bulletS. Bermon and S. J. Hood, "Capacity Optimization Planning System (CAPS)," Interfaces, Vol. 29, No. 5, 31-49, 1999.
bulletW. S. Beversluis, and H. H. Jordan, "Using A Spreadsheet For Capacity Planning And Scheduling," Production and Inventory Management Journal, Vol. 36, No. 2, 12-16, 1995.
bulletF. G. Boebel, “Quintuple Ramp Up Slope By Implementing Cross-Functional, Self-Directed Work Teams,” Proceedings of the 1996 Advanced Semiconductor Manufacturing Conference, 436-441, 1996.
bulletK. M. Bretthauer, "Capacity Planning In Manufacturing and Computer Networks," European Journal of Operational Research, Vol. 91, No. 2, 386-394, 1996.
bulletK. M. Bretthauer, and M. J. Cote, "Nonlinear Programming For Multiperiod Capacity Planning In A Manufacturing System," European Journal of Operational Research, Vol. 96, No. 1, 167-179, 1997.
bulletK. Butler and J. Matthews, "How Differentiating between Utilization of Effective Availability and Utilization of Effective Capacity Leads to a Better Understanding of Performance Metrics," IEEE 2001 Advanced Semiconductor Manufacturing Conference (ASMC '01), 21-24, 2001.
bulletM. Cakanyildirim, and R. O. Roundy, "Evaluation of Capacity Planning Practices for the Semiconductor Industry," IEEE Transactions on Semiconductor Manufacturing, Vol. 15, No. 3, 331-340, 2002.
bulletB. Catay, S. S. Erenguc, and A. J. Vakharia, "Capacity Allocation with Machine Duplication in Semiconductor Manufacturing," Naval Research Logistics, Vol. 52, No. 7, 659-667, 2005.
bulletB. Catay, S. S. Erenguc, and A. J. Vakharia, "Tool Capacity Planning In Semiconductor Manufacturing," Computers & Operations Research, Vol. 30, No. 9, 1349-1366, 2003.
bulletT. Chambers, B. Cregg, D. Crump, C. Dodgen, G. Fish, V. Holley, C. Perry, R. Ratliff, and G. Wei, "Capacity Modeling for SC Fab," Texas Instruments Technical Journal, Vol. 13, No. 4, 81-92, 1996.
bulletShi-Chung Chang, Loo-Hay Lee, Lee-Sing Pang, T.W.-Y. Chen, Yi-Chen Weng, Huei-Der Chiang and D.W.-H. Dai, "Iterative Capacity Allocation and Production Flow Estimation for Scheduling Semiconductor Fabrication", Proceedings of the Seventeenth IEEE/CPMT International Electronics Manufacturing Technology Symposium: Manufacturing Technologies - Present and Future, Austin, TX, 508-512, 1995. 
bulletW. Chou and J. Everton, "Capacity Planning For Development Wafer Fab Expansion," IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme - Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings, Cambridge, MA, 17-22, 1996. 
bulletY.-C. Chou, J.-Z. Lin, and Y.-Y. Liang, "Capacity Requirements Analysis in the Uncertain Product Demand Environment," Proceedings of the 2002 International Symposium on Semiconductor Manufacturing (ISSM2002), Tokyo, Japan, 2002.
bulletY-C Chou and J-Z Lin, "Integrating Multiple Granularity Levels of Capacity Planning in Semiconductor Manufacturing," Proceedings of the International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A. Schoemig, Tempe, AZ, April 10-12, 2002. 72-77.
bulletY. C. Chou, C. S. Wu, C. E. Kao, and S. H. Hsieh, "Integration of Capacity Planning Techniques for Tool Portfolio Planning in Semiconductor Manufacturing," International Journal of Industrial Engineering-Theory Applications And Practice, Vol. 8, No. 4, 279-288, 2001.
bulletY. C. Chou and R. C. You, "A Resource Portfolio Planning Methodology for Semiconductor Wafer Manufacturing," International Journal of Advanced Manufacturing Technology, Vol. 18, No. 1, 12-19, 2001. 
bulletY. C. Chou and C. S. Wu, "Economic Analysis and Optimization of Tool Portfolio in Semiconductor Manufacturing," IEEE Transactions on Semiconductor Manufacturing, Volume 15, Number 4, 447-453, 2002.
bulletShu-Hsing Chung, Ming-Hsiu Hsieh, and Jui-Chun Liu, "A Tool Portfolio Elimination Mechanism (TPEM) For A Wafer Fab," Proceedings of the 2004 Semiconductor Manufacturing Technology Conference, 51-53, 2004. The authors are from Dept. of Ind. Eng. & Manage., Nat. Chiao Tung Univ., Taiwan.
bulletC. W. Craighead, J. W. Patterson, and L. D. Fredendall, "Protective Capacity Positioning: Impact on Manufacturing Cell Performance," European Journal of Operational Research, Vol. 134, No. 2, 425-438, 2001.
bulletR. M. E. Christie and S. D. Wu, "Semiconductor Capacity Planning: Stochastic Modeling and Computational Studies," IIE Transactions, Vol. 34, No. 2, 2002. 
bulletK. Connerney, D. Martin, and R. Tomka, "Determining the Capacity Components of Different Classes of Multi Chamber Tools," IEEE 2001 Advanced Semiconductor Manufacturing Conference (ASMC '01), 29-32, 2001. The authors are from Microelectron. Div., IBM Corp., Essex Junction, VT.
bulletD. Delp, J. Si, Y. Hwang, and B. Pei, "Adding System Capacity to a Semiconductor Manufacturing Process Via X-Factor and Bottleneck Regulation," Proceedings of the International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A. Schoemig, Tempe, AZ, April 10-12, 2002. 112-117.
bulletD. Delp, J. Si, Y. Hwang, B. Pei, "A Dynamic System Regulation Measure for Increasing Effective Capacity: the X-Factor Theory," Proceedings of the 14th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, Munich, Germany, 2003.
bulletK. Egger, "Next Generation Production on 300 mm from Pilot to Volume," IEEE 2003 Advanced Semiconductor Manufacturing Conference (ASMC '03), 80-85, 2003. Author is from Infineon Technol. SC300 GmbH & Co. KG, Dresden, Germany.
bulletS. E. Elmaghraby, "Manufacturing Capacity and its Measurement: A Critical Evaluation," Computers & Operations Research, Vol. 18, 615-627, 1991.
bulletK. Fordyce and G. Sullivan, "A Dynamically Generated Rapid Response Capacity Planning Model For Semiconductor Fabrication Facilities," Conference on the Impact of Emerging Technologies on Computer Science and Operations Research, Williamsburg, VA, 103-127, 1994.
bulletS. J. Hood, S. Bermon, and F. Barahona, "Capacity Planning under Demand Uncertainty for Semiconductor Manufacturing," IEEE Transactions on Semiconductor Manufacturing, Vol. 16, No. 2, 273-280, 2003.
bulletM.-Y. Hsieh, M.-H. Hsieh, P. Chen, and H. W. Shie, "Innovations in Time Constraint Management - The Trade-off Between Time Constraint and Cycle Time," Proceedings of the 2002 International Symposium on Semiconductor Manufacturing (ISSM2002), Tokyo, Japan, 2002.
bulletMing-Hsiu Hsieh and Tai-Kun Lin, "MFE Practice: Manufacturing Flexibility Enhancement for Multi-Site Fab Production," Proceedings of the 2002 Semiconductor Manufacturing Technology Conference, 193-194, 2002. The authors are from Taiwan Semicond. Manuf. Co. Ltd., Hsin-Chu, Taiwan.
bulletMing-Guan Huang and Kenjil Cheng, "A Study on Feasibility of Capacity Option Issuing & Circulating for Semiconductor Foundry Industry," Proceedings of the 2002 Semiconductor Manufacturing Technology Conference, 227-230, 2002. The authors are from Dept. of Finance & Banking, Shih Chien Univ., Taipei, Taiwan.
bulletWonghee Tim Huh and Robin O. Roundy, "A Continuoustime Strategic Capacity Planning Model," Naval Research Logistics, Vol. 52, No. 4, 329-343, 2005.
bulletM.-S. Hung, E. Wang, and I. Wang, "An Effective and Simple Algorithm of the Capacity for Multi-chamber tool in the Semiconductor Manufacturing Factory," Proceedings of the 2002 International Symposium on Semiconductor Manufacturing (ISSM2002), Tokyo, Japan, 2002.
bulletJ. P. Ignizio, "Optimal Factory Tool Portfolios," 2003 IEEE International Symposium on Semiconductor Manufacturing (ISSM '03), 31-34, 2003. The author is from Intel Corp., Rio Rancho, NM, USA.
bulletY. Iwata, K. Taji, and H. Tamura, "Multi-Objective Capacity Planning for Agile Semiconductor Manufacturing," Production Planning & Control, Vol. 14, No. 3, 244-254, 2003.
bulletM. Janakiram and J. R. Morrison, "Capacity Planning and Study of Scheduling Policies Using Simulation at Motorola's Act Fab," Proceedings of the 1999 SMOMS Conference, San Jose, CA, 1999.
bulletS. Karabuk and S. D. Wu, Coordinating Strategic Capacity Planning in the Semiconductor Industry, Operations Research, Vol. 51, No. 6, 839-849, 2003.
bulletS. Karabuk and S. D. Wu, “Decentralizing Semiconductor Capacity Planning Via Internal Market Coordination,” IIE Transactions, Vol. 34, No. 9, 743-759, 2002.
bulletU. S. Karmarkar, S. Kekre, and S. Kekre, "Capacity Analysis of A Manufacturing Cell," Journal of Manufacturing Systems, Vol. 6, No. 3, 165-175, 1987.
bulletLi-Jen Ko and Ivan Wang, "Using Natural Statistics Concept to Develop a Capacity Model that Can Solve Tool-Operation Multi-to-Multi Relation of IC FAB," Proceedings of the 2002 Semiconductor Manufacturing Technology Conference, 77-80, 2002. The authors are from MXIC, Hsinchu, Taiwan.
bulletM. E. Kuhl, K. D. Hirschman, Vikram Ramamurthi, and G. R. Laubisch, "Capacity and Productivity Modeling for Research Laboratories Using a Representative Product Load," IEEE 2004 Advanced Semiconductor Manufacturing Conference (ASMC '04), 157-161, 2004. Authors are from Dept. of Ind. & Syst. Eng., Rochester Inst. of Technol., NY, USA.
bulletL. Li and X. Wang, "The Service Facility Startup and Capacity Model and its Application to the National Cranberry Case," Operations Research, Vol. 44, No. 1, 160-172, 1996.
bulletYi-Yu Liang and Yon-Chun Chou, "Option-Based Capacity Planning for Semiconductor Manufacturing," 2003 IEEE International Symposium on Semiconductor Manufacturing (ISSM '03), 77-80, 2003. The authors are from Nat. Taiwan Univ., Taipei, Taiwan.
bulletJ. Lubash and A. Porter, “Greenfield Planning Using Innovative Analytical Tools,” Proceedings of the 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 162-165, 1997.
bulletD. Martin, "How the Law of Unanticipated Consequences can Nillify the Theory of Constraints: The Case for Balanced Capacity in a Semiconductor Manufacturing Line," published in Semiconductor FabTech, see http://www.fabtech.org/journals/edition.07/section1.shtml, May 1997. 
bulletR. McKiddie and E. Neacy, "Measurement and Improvement of Manufacturing Capacity (MIMAC) Survey and Interview Results," SEMATECH Technology Transfer #94052374A-XFR, 1994.
bulletM. Montier and M. Henry, “Advanced R&D to Volume Production in 300 mm,” Proceedings of the 1999 International Interconnect Technology Conference, 9-11, 1999.
bulletS. J. New, A. G. Lockett, and R. J. Boaden, "Using Simulation in Capacity Planning," Journal of the Operational Research Society, Vol. 42, No. 4, 271-279, 1991. 
bulletT. J. Occhino, "Capacity Planning Model: The Important Inputs, Formulas, and Benefits," IEEE 2000 Advanced Semiconductor Manufacturing Conference (ASMC '00), 455-458, 2000. The authors are from White Oak Semiconductor, Sandston, VA.
bulletJ. Olhager, M. Rudberg, and J. Wikner, "Long-Term Capacity Management: Linking The Perspectives From Manufacturing Strategy And Sales And Operations Planning," International Journal of Production Economics, Vol. 69, No. 2, 215-225, 2001. 
bulletO. Ozturk, M. Boom Coburn, and S. Kitterman (Seagate Technology), "Conceptualization, Design and Implementation of a Static Capacity Model," Proceedings of the 2003 Winter Simulation Conference, S. Chick, P. J. Sánchez, D. Ferrin, and D. J. Morrice, eds., 2003.
bulletS. Rajagopalan, "Capacity Expansion And Equipment Replacement: A Unified Approach," Operations Research, Vol. 46, No. 6, 846-857, 1998. 
bulletS. Rajagopalan and H. L. Yu, "Capacity Planning with Congestion Effects," European Journal of Operational Research, Vol. 134, No. 2, 365-377, 2001.
bulletJ. K. Robinson and R. Giglio, "Capacity Planning for Semiconductor Wafer Fabrication with Time Constraints between Operations." Submitted to the 1999 Winter Simulation Conference, Phoenix, AZ.
bulletY. Shen, "Robust Capacity Modeling in Semiconductor Manufacturing," Semiconductor International, July, 2002. 
bulletS. Sisler, E. Merrill, and P. Sorrentino, "Capacity Analysis Tool," IEEE 2001 Advanced Semiconductor Manufacturing Conference (ASMC '01), 29-32, 2001. The authors are from Microelectron. Div., IBM Corp., Essex Junction, VT.
bulletK. C. So and C. S. Tang, "On Managing Operating Capacity To Reduce Congestion in Service Systems," European Journal of Operational Research, Vol. 92, 83-98, 1996.
bulletA. M. Spence and D. J. Welter, "Capacity Planning of a Photolithography Work Cell in a Wafer Manufacturing Line," Proceedings of the IEEE International Conference on Robotics and Automation, Raleigh, NC, 702-708, 1987.
bulletK. Srinivasan, "Capacity Expansion with Discrete Options for Semiconductor Manufacturing," SEMATECH Technology Transfer # 95062883A-XFR, July 31, 1995.
bulletJ. M. Swaminathan, "Tool Capacity Planning For Semiconductor Fabrication Facilities Under Demand Uncertainty," European Journal of Operations Research, Vol. 120, No. 3, 545-558, 2000.
bulletJ. M. Swaminathan, "Tool Procurement Planning for Wafer Fabrication Facilities: a Scenario-Based Approach," IIE Transactions, Vol. 34, No. 2, 145-155, 2002. 
bulletOded Tal (MAX International Engineering Group), "Advanced Resource Modeling - The First Step for Productivity Improvement," Compound Semiconductor Manufacturing Expo, July 9-11, 2001. 
bulletG. D. Taylor, "Manufacturing Capacity Analysis," Circuits Assembly, Vol. 1, No. 1, 21-25, 1990. 
bulletC. Terwiesch and R. E. Bohn, "Learning and Process Improvement During Production Ramp-Up," International Journal of Production Economics, Vol. 70, No. 1, 1-19, 2001.
bulletM. Thompson, "Using Simulation-Based Finite Capacity Planning And Scheduling Software To Improve Cycle Time In Front End Operations," Proceedings of the IEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference, Cambridge, MA, 131-135, 1995.
bulletL. B. Toktay and R. Uzsoy, "A Capacity Allocation Problem with Integer Side Constraints," European Journal of Production Research, Vol. 109, No. 1, 170-182, 1998.
bulletA. M. Uribe, J. K. Cochran, and D. L. Shunk, "Two-Stage Simulation Optimization for Agile Manufacturing Capacity planning," International Journal of Production Research, Vol. 41, No. 6, 1181-1197, 2003. 
bulletH. Vogt, "A New Method to Determine the Tool Count of a Semiconductor Factory Using Fabsim," Proceedings of the 2004 Winter Simulation Conference, Washington, DC, Dec. 5-8, 2004.
bulletHsin-Yin Wang, Chun-Shine Chen, and Min-Hsiu Hsieh, "Optimal Tool Allocation (OTA) for Cost Reduction under Uncertain Demand," Proceedings of the 2002 Semiconductor Manufacturing Technology Conference, 241-242, 2002. The authors are from Taiwan Semicond. Manuf. Co. Ltd., Hsin-Chu, Taiwan.
bulletK. J. Wang and S. H. Lin, "Capacity Expansion and Allocation for a Semiconductor Testing Facility under Constrained Budget," Production Planning & Control, Vol. 13, No. 5, 429-437, 2002.
bulletD. Williams and D. Favero, "Dynamic Deployment Modeling Tool for Photolithography WIP Management," IEEE 2002 Advanced Semiconductor Manufacturing Conference (ASMC '02), 55-58, 2002. The authors are from IBM Microelectron., Essex Junction, VT.
bulletJ. D. Witte, "Using Static Capacity Modeling Techniques in Semiconductor Manufacturing," Proceedings of the 1996 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, Cambridge, MA, 31-35, 1996.
bulletJ. C. Wortman, M. J. Euwe, M. Taal, and V. C. S. Wiers, "A Review Of Capacity Planning Techniques Within Standard Software Packages," Production Planning and Control, Vol. 7, No. 2, 117-128, 1996.
bulletC.-S. Wu, Y.-C. Chou, J.-Z. Lin, "Optimization and Economic Analysis for Tool Portfolio Planning In Semiconductor Manufacturing," 2001 IEEE International Symposium on Semiconductor Manufacturing (ISSM '01), 33-36, 2001. The authors are from Nat. Taiwan Univ., Taipei.
bulletMuh-Cherng Wu, Yai Hsiung, and Hsi-Mei Hsu, "A Tool Planning Approach Considering Cycle Time Constraints and Demand Uncertainty," International Journal of Advanced Manufacturing Technology, Vol. 26, No. 5, 565-571, 2005.
bulletK. Wu and K. Hui, "A Variable Cost - Cycle Time Based Theory of Tool Management," Proceedings of the 2002 International Symposium on Semiconductor Manufacturing (ISSM2002), Tokyo, Japan, 2002.
bulletTsung-Yu Yang, F. Chen, J. Huang, M. Yang, S. Jou, and M. Lin, "Resource Management by Variance Analysis of Capacity Costing," Proceedings of the 2002 Semiconductor Manufacturing Technology Conference, 81-84, 2002. The authors are from Macronix Int. Co. Ltd., Hsinchu, Taiwan.
bulletY. Yeh, A. Wong, and H. Han, "The Effect of Factory Size on Economic Efficiency," Proceedings of the International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM 2002), Editors G. T. Mackulak, J. W. Fowler, and A. Schoemig, Tempe, AZ, April 10-12, 2002. 101-105.
bulletZ. Zenzerovic, "Capacity Bottleneck Analysis Using The Queueing Theory," Proceedings of the 18th International Conference on Information Technology Interfaces, Pula, Croatia, 473-478, 1996.
bulletFeng Zhang, Robin Roundy, Metin Çakanyildirim and Woonghee Tim Huh, "Optimal Capacity Expansion for Multi-Product, Multi-Machine Manufacturing Systems with Stochastic Demand," IIE Transactions, Vol. 36, No. 1, 23-36, 2004.
bulletW. H. M. Zijm, and R. Buitenhek, "Capacity Planning And Lead Time Management," International Journal of Production Economics, Vol. 46-47, 165-79, 1996.

 
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