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A Bibliography on Capacity Modeling for Semiconductor Manufacturing
Section 2: Alternative Machines
 | V. Doerrsam, "Capacity Analysis of Alternative Heterogeneaous
Machines," Working Paper, 1997. |
| Y. F. Hung and G. J. Cheng, "Hybrid Capacity Modeling for Alternative
Machine Types in Linear Programming Production Planning," IIE
Transactions, Vol. 34, No. 2, 157-165, 2002. |
| P. K. Johri, "Overlapping Machine Groups in Semiconductor Wafer
Fabrication," European Journal of Operational Research, Vol. 74,
509-518, 1994. |
| R. G. Kasilingam and C. Roze, "Formulations of the Capacity Planning
Problem Considering Manufacturing Flexibility," International Journal
of Systems Science, Vol. 27, No. 10, 1027-1031, 1996. |
| Y. D. Kim and C. A. Yano, "Impact Of Throughput-Based Objectives And
Machine Grouping Decisions On The Short-Term Performance Of Flexible
Manufacturing Systems," International Journal of Production Research,
Vol. 35, No. 12, 3303-3322, 1997. |
| P. H. Koo, J. M. A. Tanchoco, and J. J. Talavage, "Tool Requirements
In Manufacturing Systems Under Dynamic Tool Sharing," Computers &
Industrial Engineering, Vol. 33, No. 3-4, 547-540, 1997. |
| F-J Kramer, M. E. Hafsi, and S. X. Bai, "Production Flow Control For
A Manufacturing System With Flexible Routings," Production and
Operations Management, Vol. 6, No. 1, 37-56, 1997. |
| R. C. Leachman and T. F. Carmon, "On Capacity Modeling for Production
Planning with Alternative Machine Types," IIE Transactions, Vol. 24,
No. 4, 62-72, 1992. |
| S. K. Lim and Y. D. Kim, "Capacity Planning For Phased Implementation
Of Flexible Manufacturing Systems Under Budget Restrictions," European
Journal of Operational Research, Vol. 104, No. 1, 175-186, 1998. |
| M. Mittler, "Two-Moment Analysis Of Alternative Tool Models With
Random Breakdowns," Proceedings of the 1996 IEEE Conference on Emerging
Technologies and Factory Automation, Kauai, HI, 546-552, 1996. |
| T. Miwa, "Automated Stepper Load Balance Allocation System Using
On-line Subsequent Layer Processing Time Estimation," Proceedings of
the 2004 International Symposium on Semiconductor Manufacturing (ISSM 2004),
Tokyo, Japan, 2004. |
| Robin G. Qiu, Patrick McDonnell, Sanjay Joshi, David W. Russell, "A Heuristic Game Theoretic Approach to Resource Sharing in Reconfigurable Manufacturing," International Journal of Advanced Manufacturing Technology, Vol. 25, No. 1-2, 78-87, 2005. |
| D. Rohan, "Machine Dedication Under Product and Process
Diversity," Proceedings of the 1999 Winter Simulation Conference,
897-902, 1999. |
| D. Rohan, "Resource Sharing in Capacity Analysis," Proceedings
of the 1992 IEEE/SEMI Advanced Manufacturing Conference, 39-42, 1992. |
| N. Q. Wu and G. Salvendy, "An Efficient Heuristic For The Design Of
Cellular Manufacturing Systems With Multiple Identical Machines,"
International Journal of Production Research, Vol. 37, No. 15, 3519-3540,
1999. |
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