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An Analysis of the Potential Impact of Control Strategies For Bulk Service Queueing Systems On Semiconductor Manufacturing Facilities

Abstract

This thesis investigates the use of both upstream and downstream information about the current and expected states of a semiconductor manufacturing facility (fab) in making batch size decisions. First, three control strategies for loading a batch machine, all of which incorporate knowledge of future arrivals into the decision structure, are critically evaluated. A new control strategy is then developed which addresses some limitations of the previously described methods. The local performances of the different batch size control strategies are then compared with regard to flowtimes through the batch step. The results show that the new method outperforms, at a local level, any of the existing methods. Next, the impact of the control strategies on the larger system of a batch machine followed by a serial processor is examined. This is done by augmenting the new control strategy to use both upstream and downstream information and making comparisons based on normalized flowtimes through the two steps. The results indicate that some improvement can be gained at low to moderate traffic intensities by looking downstream. However, as traffic intensity increases, use of downstream information can actually lead to longer delays. This indicates that the scheduling of the batch machine may be more important than the scheduling of the serial machine in a congested system.

 
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