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A Review of Real-Time Control Strategies for Furnace Batch Sizing in Semiconductor
Manufacturing
Authors:
Jennifer Robinson
John Fowler
Arizona State University
Dept. of Industrial and Mgt. Systems Engr.
Box 875906
Tempe, Arizona 85287-5906
Jonathan Bard
University of Texas at Austin
Department of Mechanical Engineering
Operations Research Group
Austin, TX 78712
Abstract:
This paper presents a review and evaluation of a number of strategies for the control
of batch queueing processes in the semiconductor manufacturing industry. Special attention
is paid to policies that include real-time information about the state of the
manufacturing facility, particularly the expected timing of future arrivals. The studies
evaluated highlight the potential benefits that might stem from taking full advantage of
real-time information. These studies clearly show that using knowledge of future arrivals
can, in many cases, lead to improvements in waiting time, even in the presence of
prediction errors. Several avenues for future research are also discussed.
Keywords:
Batch control policies, real-time information, semiconductor manufacturing
Availability:
Contact the authors.
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