Jennifer K. Robinson Consulting

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Experimenting with Large-Scale Semiconductor Manufacturing Simulations: A Frequency Domain Approach to Factor Screening

Authors:

Jennifer Robinson

Lee Schruben
Cornell University
Department of Operations Research and Industrial Engr.
Ithaca, NY 14850

John Fowler
Arizona State University
Dept. of Industrial and Mgt. Systems Engr.
Box 875906
Tempe, Arizona 85287-5906

Abstract:

Frequency domain experiments can provide an efficient way to identify important factors of a real system through the use of simulation models. In these experiments, input factors are oscillated at different frequencies. Detecting an oscillation in the output of a particular frequency indicates that the corresponding input variable (or an interaction) has significant impact. This technique is illustrated in factor screening and bottleneck analysis of an actual semiconductor wafer fabrication facility.

Reference:

Proceedings of the Institute of Industrial Engineers Research Conference, Los Angeles, CA, 1993.