Jennifer K. Robinson Consulting

A Bibliography on Capacity Modeling for Semiconductor Manufacturing

Introduction and Background

This bibliography originated as part of a project that I worked on while I was at SEMATECH. The Measurement and Improvement of Manufacturing Capacity (MIMAC) project was a joint project with JESSI. The goals of MIMAC were to understand the factors that contribute to capacity loss in semiconductor wafer fabrication facilities (fabs) and to identify methods for improving capacity planning. In support of this goal, John Fowler and I gathered together a bibliography of approximately 250 articles related to capacity planning and capacity loss factors (with emphasis on wafer fabs), sorted into 38 categories. Dr. Fowler and his graduate students maintain a searchable version of that bibliography at Arizona State University.

Since leaving SEMATECH in late 1994, I have continued to add related articles as I come across them. The total number of entries (as of September 27th) is now at 1148. The categories have been slightly modified from the original, as follows. 

A few of the articles (for which I am an author) are available in PDF format from my company website at www.FabTime.com/bibliogr.htm. I am not able to make the other papers available. You can download recent papers from the Winter Simulation Conference at no charge from the INFORMS College of Simulation website. If you are an INFORMS member, you may be able to download papers from INFORMS PubsOnline. Alternatively, some papers can be downloaded (for a fee) from Infotrieve. 

Table of Contents

Section 1: Reviews, Overviews and Bibliographies
Section 2: Alternative Tools
Section 3: Assembly, Test, and Packaging
Section 4: Batching
Section 5: Bottlenecks
Section 6: Bulk Service Queues: Theoretical
Section 7: Capacity Modeling
Section 8: Cost Modeling
Section 9: Data Models
Section 10: Due Dates
Section 11: Enterprise and Strategic Modeling
Section 12: Experimental Design
Section 13: Facility Layout, Location, and AMHS Design
Section 14: Failures and Maintenance
Section 15: Hot Lots
Section 16: Not Used
Section 17: Lead Times
Section 18: Lot Sizes, Wafer Size, Single Wafer Processing
Section 19: Mix Analysis
Section 20: Operators
Section 21: Not Used
Section 22: Order Release
Section 23: Not Used
Section 24: Performance Evaluation
Section 25: Production Planning and Control: General
Section 26: Production Planning & Control: Semiconductor
Section 27: Queueing Models
Section 28: Real-Time Control: Batch
Section 29: Real-Time Control: General
Section 30: Real-Time Control: Semiconductor
Section 31: Re-Entrant Flow
Section 32: Rework
Section 33: Scheduling
Section 34: Setup and Dedication
Section 35: Supply and Demand
Section 36: Variability and Uncertainty
Section 37: WIP Control
Section 38: Yield, Inspection, and Quality